JPS60174239U - Storage jig for semiconductor wafers - Google Patents

Storage jig for semiconductor wafers

Info

Publication number
JPS60174239U
JPS60174239U JP6170884U JP6170884U JPS60174239U JP S60174239 U JPS60174239 U JP S60174239U JP 6170884 U JP6170884 U JP 6170884U JP 6170884 U JP6170884 U JP 6170884U JP S60174239 U JPS60174239 U JP S60174239U
Authority
JP
Japan
Prior art keywords
storage jig
semiconductor wafers
semiconductor wafer
side wall
wafer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6170884U
Other languages
Japanese (ja)
Inventor
隆 廣瀬
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP6170884U priority Critical patent/JPS60174239U/en
Publication of JPS60174239U publication Critical patent/JPS60174239U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図および第２図は、従来の半導体ウェハ用収納治具
の斜視図である。第３図は、本考案の実施例の斜視図で
あり、第４図は、後面図である。1 and 2 are perspective views of a conventional semiconductor wafer storage jig. FIG. 3 is a perspective view of an embodiment of the present invention, and FIG. 4 is a rear view.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 金属製半導体ウェハ用収納治具の側壁底面部および側壁
先端部の端に弗素系樹脂を取り付けた構造を特徴とする
半導体ウェハ用収納治具。A semiconductor wafer storage jig characterized by a structure in which a fluorine-based resin is attached to the bottom of the side wall and the end of the side wall tip of the metal semiconductor wafer storage jig.
JP6170884U 1984-04-26 1984-04-26 Storage jig for semiconductor wafers Pending JPS60174239U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6170884U JPS60174239U (en) 1984-04-26 1984-04-26 Storage jig for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6170884U JPS60174239U (en) 1984-04-26 1984-04-26 Storage jig for semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS60174239U true JPS60174239U (en) 1985-11-19

Family

ID=30590232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6170884U Pending JPS60174239U (en) 1984-04-26 1984-04-26 Storage jig for semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS60174239U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175320A (en) * 1991-12-24 1993-07-13 Mitsubishi Electric Corp Semiconductor wafer cassette

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175320A (en) * 1991-12-24 1993-07-13 Mitsubishi Electric Corp Semiconductor wafer cassette

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