JPS6146730U - Wafer mounting cassette - Google Patents

Wafer mounting cassette

Info

Publication number
JPS6146730U
JPS6146730U JP1984131417U JP13141784U JPS6146730U JP S6146730 U JPS6146730 U JP S6146730U JP 1984131417 U JP1984131417 U JP 1984131417U JP 13141784 U JP13141784 U JP 13141784U JP S6146730 U JPS6146730 U JP S6146730U
Authority
JP
Japan
Prior art keywords
wafer mounting
pedestal
wafer
mounting cassette
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984131417U
Other languages
Japanese (ja)
Inventor
義雄 鉾谷
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP1984131417U priority Critical patent/JPS6146730U/en
Publication of JPS6146730U publication Critical patent/JPS6146730U/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本案の一実施例を示す平面図、第２図は第１図
におけるウエハ面内での断面図である。 １・・・・・・収納体、２・・・・・・台座、３・・・
・・・ウエハ、４・・・・・・↓ットピン、５・・・・
・・押圧ピン。FIG. 1 is a plan view showing an embodiment of the present invention, and FIG. 2 is a sectional view within the wafer plane in FIG. 1... Storage body, 2... Pedestal, 3...
...Wafer, 4...↓Top pin, 5...
...Press pin.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハを載置する部分が、ウエハの大きさに準じて複数
個のセット具により形成された台座と、該台座が挿入さ
れる収納体と、該収納体内に前記台座が収納固定された
際、前記台座上にセットされた複数個のウエハが押圧固
定される如く構成されたことを特徴とするウエハ載置用
カセット。A pedestal in which the part on which the wafer is placed is formed by a plurality of setting tools according to the size of the wafer, a storage body into which the pedestal is inserted, and when the pedestal is stored and fixed in the storage body, A cassette for mounting a wafer, characterized in that the cassette is configured such that a plurality of wafers set on the pedestal are fixed by pressure.
JP1984131417U 1984-08-31 1984-08-31 Wafer mounting cassette Pending JPS6146730U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984131417U JPS6146730U (en) 1984-08-31 1984-08-31 Wafer mounting cassette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984131417U JPS6146730U (en) 1984-08-31 1984-08-31 Wafer mounting cassette

Publications (1)

Publication Number Publication Date
JPS6146730U true JPS6146730U (en) 1986-03-28

Family

ID=30690007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984131417U Pending JPS6146730U (en) 1984-08-31 1984-08-31 Wafer mounting cassette

Country Status (1)

Country Link
JP (1) JPS6146730U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012129231A (en) * 2010-12-13 2012-07-05 Ushio Inc Exposure device and exposure method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012129231A (en) * 2010-12-13 2012-07-05 Ushio Inc Exposure device and exposure method

Similar Documents

Publication Publication Date Title
JPS6146730U (en) Wafer mounting cassette
JPS5933913U (en) panel base
JPS6037250U (en) 3 terminal semiconductor device
JPS6127258U (en) semiconductor equipment
JPS59180424U (en) Jig for semiconductor substrate
JPS60174239U (en) Storage jig for semiconductor wafers
JPS5983029U (en) semiconductor substrate
JPS619834U (en) semiconductor wafer
JPS58109251U (en) Semiconductor parts packaging
JPS60173150U (en) Cassette positioning device
JPS60169900U (en) Tray for transporting semiconductor equipment
JPS5916139U (en) integrated circuit
JPS5867686U (en) suction head
JPS598201U (en) electrical equipment mounting plate
JPS58144941U (en) body of electronic equipment
JPS60173152U (en) Cassette positioning device
JPS60101755U (en) semiconductor equipment
JPS60163512U (en) magnetic head device
JPS5933250U (en) Storage tray for semiconductor devices
JPS6126033U (en) can
JPS587340U (en) Tape for dividing semiconductor pellets
JPS58120661U (en) semiconductor equipment
JPS6120203U (en) holder
JPS60116234U (en) Semiconductor substrate holding device for ion implantation
JPS5825039U (en) semiconductor substrate