JPS60119742U - Storage jig for semiconductor wafers - Google Patents
Storage jig for semiconductor wafersInfo
- Publication number
- JPS60119742U JPS60119742U JP882784U JP882784U JPS60119742U JP S60119742 U JPS60119742 U JP S60119742U JP 882784 U JP882784 U JP 882784U JP 882784 U JP882784 U JP 882784U JP S60119742 U JPS60119742 U JP S60119742U
- Authority
- JP
- Japan
- Prior art keywords
- storage jig
- semiconductor wafers
- jig
- storage
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の半導体ウェハ収納治具の斜視図である
。第２図は、本考案の実施例の斜視図であり、第３図は
側面図である。
尚、図において、１． ２． ３． ４・・・・・・収
納治具の側壁先端部、５． ６． ７． 訃・・・・
・弗素系樹脂製の側壁先端部である。FIG. 1 is a perspective view of a conventional semiconductor wafer storage jig. FIG. 2 is a perspective view of an embodiment of the present invention, and FIG. 3 is a side view. In addition, in the figure, 1. 2. 3. 4...The tip of the side wall of the storage jig, 5. 6. 7. Death...
・The tip of the side wall is made of fluorine resin.
Claims (1)
樹脂製であることを特徴とする半導体ウェハ用収納治具
。A storage jig for semiconductor wafers, characterized in that only the tip of the side wall of the 10-core wafer storage jig made by Konkuku is made of fluorine resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP882784U JPS60119742U (en) | 1984-01-24 | 1984-01-24 | Storage jig for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP882784U JPS60119742U (en) | 1984-01-24 | 1984-01-24 | Storage jig for semiconductor wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60119742U true JPS60119742U (en) | 1985-08-13 |
Family
ID=30488472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP882784U Pending JPS60119742U (en) | 1984-01-24 | 1984-01-24 | Storage jig for semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60119742U (en) |
-
1984
- 1984-01-24 JP JP882784U patent/JPS60119742U/en active Pending
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