JPH029438U - - Google Patents

Info

Publication number
JPH029438U
JPH029438U JP8838188U JP8838188U JPH029438U JP H029438 U JPH029438 U JP H029438U JP 8838188 U JP8838188 U JP 8838188U JP 8838188 U JP8838188 U JP 8838188U JP H029438 U JPH029438 U JP H029438U
Authority
JP
Japan
Prior art keywords
wafer
wafer stage
region
disposed
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8838188U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8838188U priority Critical patent/JPH029438U/ja
Publication of JPH029438U publication Critical patent/JPH029438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例1を示す平面図、第2
図は実施例2を示す平面図である。 1……ウエハーステージ、2……ウエハー、3
……反射型フオトインタラプタ、4……吸着孔、
11……ウエハーステージ、12……ウエハー、
13……フオトトランジスタ、14……吸着孔。
Figure 1 is a plan view showing the first embodiment of the present invention;
The figure is a plan view showing the second embodiment. 1...Wafer stage, 2...Wafer, 3
... Reflective photo interrupter, 4... Suction hole,
11...Wafer stage, 12...Wafer,
13...Phototransistor, 14...Adsorption hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空吸着等のウエハーの固定手段を有するウエ
ハーステージにおいて、該ウエハーステージ上の
ウエハーが置かれるべき領域の任意の位置に少く
とも1個の光学式センサを配置したことを特徴と
するウエハーステージ。
A wafer stage having a wafer fixing means such as vacuum suction, characterized in that at least one optical sensor is disposed at an arbitrary position in a region on the wafer stage where a wafer is to be placed.
JP8838188U 1988-07-01 1988-07-01 Pending JPH029438U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8838188U JPH029438U (en) 1988-07-01 1988-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8838188U JPH029438U (en) 1988-07-01 1988-07-01

Publications (1)

Publication Number Publication Date
JPH029438U true JPH029438U (en) 1990-01-22

Family

ID=31312951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8838188U Pending JPH029438U (en) 1988-07-01 1988-07-01

Country Status (1)

Country Link
JP (1) JPH029438U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016121A1 (en) * 1997-09-23 1999-04-01 Tokyo Electron Limited Device and method for detecting substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016121A1 (en) * 1997-09-23 1999-04-01 Tokyo Electron Limited Device and method for detecting substrate

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