JPH029438U - - Google Patents
Info
- Publication number
- JPH029438U JPH029438U JP8838188U JP8838188U JPH029438U JP H029438 U JPH029438 U JP H029438U JP 8838188 U JP8838188 U JP 8838188U JP 8838188 U JP8838188 U JP 8838188U JP H029438 U JPH029438 U JP H029438U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer stage
- region
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第1図は本考案の実施例1を示す平面図、第2
図は実施例2を示す平面図である。
1……ウエハーステージ、2……ウエハー、3
……反射型フオトインタラプタ、4……吸着孔、
11……ウエハーステージ、12……ウエハー、
13……フオトトランジスタ、14……吸着孔。
Figure 1 is a plan view showing the first embodiment of the present invention;
The figure is a plan view showing the second embodiment. 1...Wafer stage, 2...Wafer, 3
... Reflective photo interrupter, 4... Suction hole,
11...Wafer stage, 12...Wafer,
13...Phototransistor, 14...Adsorption hole.
Claims (1)
ハーステージにおいて、該ウエハーステージ上の
ウエハーが置かれるべき領域の任意の位置に少く
とも1個の光学式センサを配置したことを特徴と
するウエハーステージ。 A wafer stage having a wafer fixing means such as vacuum suction, characterized in that at least one optical sensor is disposed at an arbitrary position in a region on the wafer stage where a wafer is to be placed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8838188U JPH029438U (en) | 1988-07-01 | 1988-07-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8838188U JPH029438U (en) | 1988-07-01 | 1988-07-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH029438U true JPH029438U (en) | 1990-01-22 |
Family
ID=31312951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8838188U Pending JPH029438U (en) | 1988-07-01 | 1988-07-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH029438U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999016121A1 (en) * | 1997-09-23 | 1999-04-01 | Tokyo Electron Limited | Device and method for detecting substrate |
-
1988
- 1988-07-01 JP JP8838188U patent/JPH029438U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999016121A1 (en) * | 1997-09-23 | 1999-04-01 | Tokyo Electron Limited | Device and method for detecting substrate |