JPH0256442U - - Google Patents
Info
- Publication number
- JPH0256442U JPH0256442U JP13562588U JP13562588U JPH0256442U JP H0256442 U JPH0256442 U JP H0256442U JP 13562588 U JP13562588 U JP 13562588U JP 13562588 U JP13562588 U JP 13562588U JP H0256442 U JPH0256442 U JP H0256442U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- substantially equivalent
- orientation flat
- vacuum
- spin chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Description
第１図はこの考案の一実施例によるスピンチヤ
ツクを示す平面図、第２図はその断面図、第３図
は従来のスピンチヤツクの断面図である。図中、
１は半導体ウエハ、２はスピンチヤツク、３は突
起、４は真空吸着孔である。各図中同一符号は同
一又は相当部分を示す。
FIG. 1 is a plan view showing a spin chuck according to an embodiment of the invention, FIG. 2 is a sectional view thereof, and FIG. 3 is a sectional view of a conventional spin chuck. In the figure,
1 is a semiconductor wafer, 2 is a spin chuck, 3 is a protrusion, and 4 is a vacuum suction hole. The same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
に、上記半導体ウエハを真空吸着させる真空孔と
、上記半導体ウエハのオリエンテーシヨンフラツ
トと略等価な重量を持つ突起とを有し、上記突起
にて上記オリエンテーシヨンフラツトを位置決め
したことを特徴とするスピンチヤツク。 A vacuum hole for vacuum-chucking the semiconductor wafer and a protrusion having a weight substantially equivalent to an orientation flat of the semiconductor wafer are provided on a support surface having dimensions substantially equivalent to the outer periphery of the semiconductor wafer. A spin chuck characterized in that the above-mentioned orientation flat is positioned at.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562588U JPH0256442U (en) | 1988-10-18 | 1988-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13562588U JPH0256442U (en) | 1988-10-18 | 1988-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0256442U true JPH0256442U (en) | 1990-04-24 |
Family
ID=31395420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13562588U Pending JPH0256442U (en) | 1988-10-18 | 1988-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0256442U (en) |
-
1988
- 1988-10-18 JP JP13562588U patent/JPH0256442U/ja active Pending