JPH0241438U - - Google Patents
Info
- Publication number
- JPH0241438U JPH0241438U JP11906188U JP11906188U JPH0241438U JP H0241438 U JPH0241438 U JP H0241438U JP 11906188 U JP11906188 U JP 11906188U JP 11906188 U JP11906188 U JP 11906188U JP H0241438 U JPH0241438 U JP H0241438U
- Authority
- JP
- Japan
- Prior art keywords
- positions
- orientation flat
- view
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例によるウエハステ
ージの平面図、第２図はその断面図、第３図は従
来のウエハステージの平面図、第４図は従来のウ
エハマウンターの平面図である。図中１はシート
ドラム、２はダイシングフレーム位置決めピン、
３はウエハステージ、３ａ〜３ｄはオリフラ合せ
位置である。なお、図中、同一符号は同一、また
は相当部分を示す。
Fig. 1 is a plan view of a wafer stage according to an embodiment of this invention, Fig. 2 is a cross-sectional view thereof, Fig. 3 is a plan view of a conventional wafer stage, and Fig. 4 is a plan view of a conventional wafer mounter. . In the figure, 1 is a sheet drum, 2 is a dicing frame positioning pin,
3 is a wafer stage, and 3a to 3d are orientation flat alignment positions. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
リフラ合せ位置を互いに９０度離れた位置に４箇
所設けたことを特徴とするウエハマウンター。 A wafer mounter of a surface non-contact type, characterized in that four orientation flat alignment positions are provided at positions 90 degrees apart from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11906188U JPH0241438U (en) | 1988-09-09 | 1988-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11906188U JPH0241438U (en) | 1988-09-09 | 1988-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241438U true JPH0241438U (en) | 1990-03-22 |
Family
ID=31363963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11906188U Pending JPH0241438U (en) | 1988-09-09 | 1988-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241438U (en) |
-
1988
- 1988-09-09 JP JP11906188U patent/JPH0241438U/ja active Pending