JPS62186837U - - Google Patents
Info
- Publication number
- JPS62186837U JPS62186837U JP7425686U JP7425686U JPS62186837U JP S62186837 U JPS62186837 U JP S62186837U JP 7425686 U JP7425686 U JP 7425686U JP 7425686 U JP7425686 U JP 7425686U JP S62186837 U JPS62186837 U JP S62186837U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- wafer transfer
- transfer device
- wafer
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Description
第１図はこの考案の一実施例を示す側面図、第
２図は第１図の線―の拡大断面図、第３図は
ウエハの裏面図、第４図は従来装置の側面図、第
５図は第４図の線―の拡大断面図、第６図は
ウエハの裏面図である。
図中、１はウエハ、２はベルト、３はプーリー
、５は凸部である。なお、各図中同一符号は同一
または相当部分を示す。
Fig. 1 is a side view showing an embodiment of this invention, Fig. 2 is an enlarged sectional view along the line - in Fig. 1, Fig. 3 is a back view of the wafer, Fig. 4 is a side view of the conventional device, and Fig. 4 is a side view of the conventional device. FIG. 5 is an enlarged sectional view taken along the line - in FIG. 4, and FIG. 6 is a back view of the wafer. In the figure, 1 is a wafer, 2 is a belt, 3 is a pulley, and 5 is a convex portion. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
置において、前記ベルトの搬送面を凹凸にしたこ
とを特徴とするウエハ搬送装置。 (2) ベルトの搬送面に、搬送方向に縦列する多
数の凸部を設けた実用新案登録請求の範囲第１項
記載のウエハ搬送装置。 (3) 凸部が小さな角状のものである実用新案登
録請求の範囲第２項記載のウエハ搬送装置。[Claims for Utility Model Registration] (1) A wafer transfer device having a wafer transfer belt, characterized in that the transfer surface of the belt is uneven. (2) The wafer transfer device according to claim 1, wherein a number of convex portions arranged in tandem in the transfer direction are provided on the transfer surface of the belt. (3) The wafer transfer device according to claim 2, wherein the convex portion has a small angular shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425686U JPS62186837U (en) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425686U JPS62186837U (en) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186837U true JPS62186837U (en) | 1987-11-27 |
Family
ID=30919301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7425686U Pending JPS62186837U (en) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186837U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009026224A (en) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | Card conveying apparatus |
-
1986
- 1986-05-16 JP JP7425686U patent/JPS62186837U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009026224A (en) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | Card conveying apparatus |