JPS62186429U - - Google Patents
Info
- Publication number
- JPS62186429U JPS62186429U JP7425586U JP7425586U JPS62186429U JP S62186429 U JPS62186429 U JP S62186429U JP 7425586 U JP7425586 U JP 7425586U JP 7425586 U JP7425586 U JP 7425586U JP S62186429 U JPS62186429 U JP S62186429U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tapered
- utility
- cross
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例を示す縦断面図、
第２図は平面図、第３図は従来のウエハホルダー
を示す縦断面図、第４図は平面図である。
図において、１はウエハ、３はウエハホルダー
、３ａはウエハ載置面である。なお、各図中同一
符号は同一または相当部分を示す。
FIG. 1 is a longitudinal sectional view showing an embodiment of this invention.
FIG. 2 is a plan view, FIG. 3 is a vertical sectional view showing a conventional wafer holder, and FIG. 4 is a plan view. In the figure, 1 is a wafer, 3 is a wafer holder, and 3a is a wafer mounting surface. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
エハ載置面の断面形状をテーパー状にしたことを
特徴とするウエハホルダー。 A wafer holder on which a wafer is placed, characterized in that the cross-sectional shape of the wafer placement surface is tapered.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425586U JPS62186429U (en) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425586U JPS62186429U (en) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186429U true JPS62186429U (en) | 1987-11-27 |
Family
ID=30919299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7425586U Pending JPS62186429U (en) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186429U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5966199A (en) * | 1982-10-08 | 1984-04-14 | 株式会社日立製作所 | Package conveying mechanism |
-
1986
- 1986-05-16 JP JP7425586U patent/JPS62186429U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5966199A (en) * | 1982-10-08 | 1984-04-14 | 株式会社日立製作所 | Package conveying mechanism |