JPS6178537U - - Google Patents
Info
- Publication number
- JPS6178537U JPS6178537U JP16499784U JP16499784U JPS6178537U JP S6178537 U JPS6178537 U JP S6178537U JP 16499784 U JP16499784 U JP 16499784U JP 16499784 U JP16499784 U JP 16499784U JP S6178537 U JPS6178537 U JP S6178537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chucking
- suction
- holds
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す断面側面図、
第２図は同平面図、第３図は従来例を示す断面側
面図、第４図は同平面図である。
１……チヤツキング部、３……チヤツキング面
、４……ウエハ、５……吸着部、５ａ……凹部。
FIG. 1 is a cross-sectional side view showing an embodiment of the present invention;
FIG. 2 is a plan view of the same, FIG. 3 is a sectional side view showing a conventional example, and FIG. 4 is a plan view of the same. DESCRIPTION OF SYMBOLS 1...Chucking part, 3...Chicking surface, 4...Wafer, 5...Adsorption part, 5a...Recessed part.
Claims (1)
部のチヤツキング面には、吸着状態において大気
よりも負圧となる凹部を形成した複数の吸着部が
前記ウエハの外周縁部に対応して設けられたこと
を特徴とするウエハのチヤツキング装置。 The chucking surface of the chucking part that holds the set wafer by suction is provided with a plurality of suction parts corresponding to the outer periphery of the wafer, each having a recess that has a negative pressure than the atmosphere in the suction state. Wafer chucking equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499784U JPS6178537U (en) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499784U JPS6178537U (en) | 1984-10-30 | 1984-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178537U true JPS6178537U (en) | 1986-05-26 |
Family
ID=30722860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499784U Pending JPS6178537U (en) | 1984-10-30 | 1984-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178537U (en) |
-
1984
- 1984-10-30 JP JP16499784U patent/JPS6178537U/ja active Pending
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