JPS6386937U - - Google Patents

Info

Publication number
JPS6386937U
JPS6386937U JP18182886U JP18182886U JPS6386937U JP S6386937 U JPS6386937 U JP S6386937U JP 18182886 U JP18182886 U JP 18182886U JP 18182886 U JP18182886 U JP 18182886U JP S6386937 U JPS6386937 U JP S6386937U
Authority
JP
Japan
Prior art keywords
supply source
vacuum
small hole
groove
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18182886U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18182886U priority Critical patent/JPS6386937U/ja
Publication of JPS6386937U publication Critical patent/JPS6386937U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本考案による真空チヤツクの平面図
、第2図は、第1図のA―A断面図、第3図は、
従来の真空チヤツクの側面断面図、第4図は、被
加工物の吸着状態を示す拡大図である。 4……小穴、9……小穴。
Fig. 1 is a plan view of the vacuum chuck according to the present invention, Fig. 2 is a sectional view taken along line A-A in Fig. 1, and Fig. 3 is a
FIG. 4, a side cross-sectional view of a conventional vacuum chuck, is an enlarged view showing the state of suction of a workpiece. 4...small hole, 9...small hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 保持面に、真空圧供給源に接続された溝もしく
は小穴と、圧力流体供給源に接続された複数の小
穴とを所定の間隔で形成したことを特徴とする真
空チヤツク。
A vacuum chuck characterized in that a groove or a small hole connected to a vacuum pressure supply source and a plurality of small holes connected to a pressure fluid supply source are formed at predetermined intervals on a holding surface.
JP18182886U 1986-11-28 1986-11-28 Pending JPS6386937U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18182886U JPS6386937U (en) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18182886U JPS6386937U (en) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6386937U true JPS6386937U (en) 1988-06-06

Family

ID=31127058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18182886U Pending JPS6386937U (en) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6386937U (en)

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