JPH01156832U - - Google Patents
Info
- Publication number
- JPH01156832U JPH01156832U JP5219488U JP5219488U JPH01156832U JP H01156832 U JPH01156832 U JP H01156832U JP 5219488 U JP5219488 U JP 5219488U JP 5219488 U JP5219488 U JP 5219488U JP H01156832 U JPH01156832 U JP H01156832U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- vacuum
- plate
- chuck plate
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第1図は本考案の一実施例を示す縦断面図、第
2図〜第4図は従来技術の説明図である。
1……チヤツクベース、2……チヤツクプレー
ト、3……チヤツクプレートに明けられている微
小穴、4……吸引口、5……チヤツクプレートの
外縁部に当てられたリング、6……同外縁部を固
定しているボルト、7……チヤツクプレートの中
央部を固定しているボルト、8……被加工物。
FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention, and FIGS. 2 to 4 are explanatory diagrams of the prior art. 1...Chuck base, 2...Chuck plate, 3...Minute hole drilled in the chuck plate, 4...Suction port, 5...Ring applied to the outer edge of the chuck plate, 6... Bolts fixing the outer edge of the chuck plate, 7... Bolts fixing the center part of the chuck plate, 8... Workpiece.
Claims (1)
ツクプレートを固定具により固定し、このチヤツ
クプレートに被加工物を真空圧により吸着保持す
る真空チヤツクにおいて、固定具をチヤツクプレ
ートの外縁部および中央部に配置したことを特徴
とする真空チヤツク。 In a vacuum chuck, a chuck plate having a large number of micro holes is fixed to the chuck base using a fixture, and a workpiece is suctioned and held on the chuck plate by vacuum pressure. A vacuum chuck characterized in that the chuck is placed in a vacuum chuck.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988052194U JPH0639869Y2 (en) | 1988-04-20 | 1988-04-20 | Vacuum chuck |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988052194U JPH0639869Y2 (en) | 1988-04-20 | 1988-04-20 | Vacuum chuck |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01156832U true JPH01156832U (en) | 1989-10-27 |
JPH0639869Y2 JPH0639869Y2 (en) | 1994-10-19 |
Family
ID=31278201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988052194U Expired - Lifetime JPH0639869Y2 (en) | 1988-04-20 | 1988-04-20 | Vacuum chuck |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0639869Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011213042A (en) * | 2010-04-01 | 2011-10-27 | Ihi Corp | Vacuum suction stage |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694238U (en) * | 1979-12-18 | 1981-07-27 |
-
1988
- 1988-04-20 JP JP1988052194U patent/JPH0639869Y2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694238U (en) * | 1979-12-18 | 1981-07-27 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011213042A (en) * | 2010-04-01 | 2011-10-27 | Ihi Corp | Vacuum suction stage |
Also Published As
Publication number | Publication date |
---|---|
JPH0639869Y2 (en) | 1994-10-19 |