JPS62198034U - - Google Patents
Info
- Publication number
- JPS62198034U JPS62198034U JP8543486U JP8543486U JPS62198034U JP S62198034 U JPS62198034 U JP S62198034U JP 8543486 U JP8543486 U JP 8543486U JP 8543486 U JP8543486 U JP 8543486U JP S62198034 U JPS62198034 U JP S62198034U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- groove
- vacuum
- bakyumchaku
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は本考案によるバキユームチヤツクの一
実施例を示す平面図、第２図は第１図中のＡ―Ａ
断面図、第３図及び第４図はそれぞれ従来のバキ
ユームチヤツクの平面図である。
図面中、１はバキユームチヤツク、２は十文字
形の溝、１１はベース、１６は貫通孔である。
FIG. 1 is a plan view showing an embodiment of the vacuum chuck according to the present invention, and FIG. 2 is an A-A in FIG. 1.
The sectional view, FIGS. 3 and 4 are respectively plan views of a conventional vacuum chuck. In the drawings, 1 is a vacuum chuck, 2 is a cross-shaped groove, 11 is a base, and 16 is a through hole.
Claims (1)
て複数の溝が設けられ、真空ポンプに接続される
貫通孔が各溝に明けられているバキユームチヤツ
クにおいて、前記複数の溝が互いに独立した十文
字形の溝であることを特徴とするバキユームチヤ
ツク。 In a vacuum chuck in which a plurality of grooves are provided as vacuum suction openings on the article mounting surface of the base, and a through hole connected to a vacuum pump is formed in each groove, the plurality of grooves are arranged in a cross-shaped manner independent of each other. Bakyumchaku is characterized by a shaped groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8543486U JPS62198034U (en) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8543486U JPS62198034U (en) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198034U true JPS62198034U (en) | 1987-12-16 |
Family
ID=30940834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8543486U Pending JPS62198034U (en) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198034U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012000765A (en) * | 2010-06-15 | 2012-01-05 | Lg Chem Ltd | Roll film suction device of roll film cutting system |
-
1986
- 1986-06-06 JP JP8543486U patent/JPS62198034U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012000765A (en) * | 2010-06-15 | 2012-01-05 | Lg Chem Ltd | Roll film suction device of roll film cutting system |