JPS61177839U - - Google Patents
Info
- Publication number
- JPS61177839U JPS61177839U JP6073985U JP6073985U JPS61177839U JP S61177839 U JPS61177839 U JP S61177839U JP 6073985 U JP6073985 U JP 6073985U JP 6073985 U JP6073985 U JP 6073985U JP S61177839 U JPS61177839 U JP S61177839U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum suction
- suction hole
- recess
- stage
- positioning recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
Landscapes
- Screen Printers (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Description
第１図はこの考案の一実施例の吸着ステージの
要部平面図で、第２図は第１図の―線に沿う
断面図である。第３図は従来の吸着ステージの要
部平面図で、第４図は第３図の―線に沿う断
面図である。
２…位置決め用の凹部、２ａ…底面、３…真空
吸引孔、４…凹溝。
FIG. 1 is a plan view of a main part of a suction stage according to an embodiment of this invention, and FIG. 2 is a sectional view taken along the line -- in FIG. FIG. 3 is a plan view of a main part of a conventional suction stage, and FIG. 4 is a sectional view taken along the line - - in FIG. 2... Recessed portion for positioning, 2a... Bottom surface, 3... Vacuum suction hole, 4... Concave groove.
Claims (1)
底面に開口する真空吸引孔とを有する吸着ステー
ジにおいて、 前記凹部の底面の真空吸引孔の周囲に放射状の
凹溝を形成したことを特徴とする吸着ステージ。[Scope of Claim for Utility Model Registration] In a suction stage having a positioning recess and a vacuum suction hole opening at the bottom of the positioning recess, radial grooves are provided around the vacuum suction hole at the bottom of the recess. An adsorption stage characterized by the formation of an adsorption stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073985U JPS61177839U (en) | 1985-04-23 | 1985-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073985U JPS61177839U (en) | 1985-04-23 | 1985-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61177839U true JPS61177839U (en) | 1986-11-06 |
Family
ID=30588366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6073985U Pending JPS61177839U (en) | 1985-04-23 | 1985-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177839U (en) |
-
1985
- 1985-04-23 JP JP6073985U patent/JPS61177839U/ja active Pending