JPS63104346U - - Google Patents
Info
- Publication number
- JPS63104346U JPS63104346U JP20165086U JP20165086U JPS63104346U JP S63104346 U JPS63104346 U JP S63104346U JP 20165086 U JP20165086 U JP 20165086U JP 20165086 U JP20165086 U JP 20165086U JP S63104346 U JPS63104346 U JP S63104346U
- Authority
- JP
- Japan
- Prior art keywords
- work holding
- protruding
- holding mechanism
- openings
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の実施例を示すワーク保持機構
の断面図、第２図は従来のワーク保持機構の一構
成を示す側面図、第３図は第２図の平面図、第４
図は第１図の平面図である。
１１……ワーク保持治具、１２……ワーク保持
面、１３……基板、１４……開口部、１５……通
気孔部、１６……吸引孔、１７……吸引管、１８
……突起部材、１９……貫通孔、２０……弾性部
材。
Fig. 1 is a sectional view of a work holding mechanism showing an embodiment of the present invention, Fig. 2 is a side view showing one configuration of a conventional work holding mechanism, Fig. 3 is a plan view of Fig. 2, and Fig. 4 is a side view showing a configuration of a conventional work holding mechanism.
The figure is a plan view of FIG. 1. 11...Work holding jig, 12...Work holding surface, 13...Substrate, 14...Opening, 15...Vent hole portion, 16...Suction hole, 17...Suction pipe, 18
... protrusion member, 19 ... through hole, 20 ... elastic member.
Claims (1)
有するワーク保持治具と、前記ワーク保持面に所
定間隔をもつて配設された複数の開口部と、前記
ワーク保持治具内部に前記各開口部と接続して形
成され内部が負圧に保たれる通気孔部とを備えた
ワーク保持機構において、 前記各開口部に前記ワーク保持面から突出して
設けられ該突出方向に貫通孔を有する突起部材と
、 この突起部材の側部外周に取付けられ該突起部
材の突出端部より突出して前記被保持物に当接す
る弾性部材とを設けたことを特徴とするワーク保
持機構。 ２ 前記突起部材及び前記弾性部材は、導電性材
料により形成された実用新案登録請求の範囲第１
項記載のワーク保持機構。 ３ 前記突起部材は、前記側部外周にテーパを有
する実用新案登録請求の範囲第１項記載のワーク
保持機構。[Claims for Utility Model Registration] 1. A work holding jig having a flat work holding surface facing an object to be held, a plurality of openings arranged at predetermined intervals on the work holding surface, In the work holding mechanism, the work holding jig includes a ventilation hole formed inside the work holding jig to be connected to each of the openings and to maintain a negative pressure inside the work holding jig, wherein each of the openings is provided with a ventilation hole protruding from the work holding surface. A protruding member having a through hole in the protruding direction; and an elastic member attached to the outer periphery of the side of the protruding member, protruding from the protruding end of the protruding member, and coming into contact with the object to be held. Work holding mechanism. 2. The protrusion member and the elastic member are made of a conductive material.
Work holding mechanism described in section. 3. The work holding mechanism according to claim 1, wherein the protrusion member has a tapered outer periphery of the side portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20165086U JPS63104346U (en) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20165086U JPS63104346U (en) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63104346U true JPS63104346U (en) | 1988-07-06 |
Family
ID=31165301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20165086U Pending JPS63104346U (en) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63104346U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052050A (en) * | 1991-06-25 | 1993-01-08 | Nec Corp | High-power semiconductor integrated circuit cooling test tool |
| JP2013232450A (en) * | 2012-04-27 | 2013-11-14 | Towa Corp | Vacuum adsorption sheet for individualization apparatus and manufacturing method of fixing jig using the same |
-
1986
- 1986-12-24 JP JP20165086U patent/JPS63104346U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052050A (en) * | 1991-06-25 | 1993-01-08 | Nec Corp | High-power semiconductor integrated circuit cooling test tool |
| JP2013232450A (en) * | 2012-04-27 | 2013-11-14 | Towa Corp | Vacuum adsorption sheet for individualization apparatus and manufacturing method of fixing jig using the same |