JPS60142036U - wafer jacket plate - Google Patents
wafer jacket plateInfo
- Publication number
- JPS60142036U JPS60142036U JP1984029864U JP2986484U JPS60142036U JP S60142036 U JPS60142036 U JP S60142036U JP 1984029864 U JP1984029864 U JP 1984029864U JP 2986484 U JP2986484 U JP 2986484U JP S60142036 U JPS60142036 U JP S60142036U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- jacket plate
- intake
- wafer
- spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Jigs For Machine Tools (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案にかかるウェハチャックプレートの一例
を示す平面図、第２図は第１図中Ａ−Ａ線に沿う断面図
、第３図は第１図の中央部拡大図、第４図は従来例を示
す平面図である。
１・・・・・・プレート本体、２・・・・・・吸引溝、
３・・・・・・排気溝、４・・・・・・通気孔、５・・
・・・・吸気口。FIG. 1 is a plan view showing an example of a wafer chuck plate according to the present invention, FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1, FIG. 3 is an enlarged view of the center of FIG. The figure is a plan view showing a conventional example. 1...Plate body, 2...Suction groove,
3...Exhaust groove, 4...Vent hole, 5...
...Intake port.
Claims (1)
旋状吸気溝と、吸気溝に対し溝条間を平行して旋回し外
周端を本体外側面に開口させた螺旋状排気溝とを形成し
てなるウエハチャックプレート。On the surface of the plate body, there are provided a spiral intake groove whose approximately central portion communicates with the intake port, and a spiral exhaust groove whose outer circumferential end is opened on the outer surface of the main body by turning parallel to the groove between the grooves with respect to the intake groove. Wafer chuck plate made by forming.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984029864U JPS60142036U (en) | 1984-02-29 | 1984-02-29 | wafer jacket plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984029864U JPS60142036U (en) | 1984-02-29 | 1984-02-29 | wafer jacket plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60142036U true JPS60142036U (en) | 1985-09-20 |
Family
ID=30529052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984029864U Pending JPS60142036U (en) | 1984-02-29 | 1984-02-29 | wafer jacket plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60142036U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0788761A (en) * | 1993-09-21 | 1995-04-04 | Sumitomo Sitix Corp | Holding plate for polishing semiconductor substrate |
| JP2011044474A (en) * | 2009-08-19 | 2011-03-03 | Disco Abrasive Syst Ltd | Grinding device for wafer |
| JP2020181871A (en) * | 2019-04-24 | 2020-11-05 | キヤノン株式会社 | Substrate holding apparatus, lithography apparatus, and manufacturing method of article |
-
1984
- 1984-02-29 JP JP1984029864U patent/JPS60142036U/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0788761A (en) * | 1993-09-21 | 1995-04-04 | Sumitomo Sitix Corp | Holding plate for polishing semiconductor substrate |
| JP2011044474A (en) * | 2009-08-19 | 2011-03-03 | Disco Abrasive Syst Ltd | Grinding device for wafer |
| JP2020181871A (en) * | 2019-04-24 | 2020-11-05 | キヤノン株式会社 | Substrate holding apparatus, lithography apparatus, and manufacturing method of article |
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