JPS6175128U - - Google Patents
Info
- Publication number
- JPS6175128U JPS6175128U JP16073784U JP16073784U JPS6175128U JP S6175128 U JPS6175128 U JP S6175128U JP 16073784 U JP16073784 U JP 16073784U JP 16073784 U JP16073784 U JP 16073784U JP S6175128 U JPS6175128 U JP S6175128U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- semiconductor wafer
- pins protruding
- support
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係るスピンナーチヤツクの一
実施例を示し、同図ａは平面図、同図ｂは側面図
、同図ｃは一部側断面図、第２図は従来のスピン
ナーチヤツクを示し同図ａは平面図、同図ｂは側
断面図、同図ｃは半導体ウエハー設置状態での側
断面図を示す。
図中、１：スピンナーチヤツク、３：フオトレ
ジスト、４：半導体ウエハー、５：固定ピン、６
：ピン。
Fig. 1 shows an embodiment of a spinner chuck according to the present invention, in which Fig. 1a is a plan view, Fig. 1b is a side view, Fig. 1c is a partial side sectional view, and Fig. 2 is a conventional spinner chuck. FIG. 3A shows a plan view, FIG. 1B shows a side sectional view, and FIG. In the figure, 1: spinner chuck, 3: photoresist, 4: semiconductor wafer, 5: fixing pin, 6
:pin.
Claims (1)
の側面部を固定支持する複数本の固定ピンと、前
記回転台から突出し半導体ウエハーの底面部を回
転台から持ち上げ支持する複数本のピンを具備し
たことを特徴とするスピンナーチヤツク。 A rotary table, a plurality of fixing pins protruding from the rotary table to fixedly support the side surface of the semiconductor wafer, and a plurality of pins protruding from the rotary table to lift and support the bottom surface of the semiconductor wafer from the rotary table. Features a spinner chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16073784U JPS6175128U (en) | 1984-10-23 | 1984-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16073784U JPS6175128U (en) | 1984-10-23 | 1984-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175128U true JPS6175128U (en) | 1986-05-21 |
Family
ID=30718656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16073784U Pending JPS6175128U (en) | 1984-10-23 | 1984-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175128U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6091640A (en) * | 1983-10-25 | 1985-05-23 | Mitsutoyo Mfg Co Ltd | Positioning device for wafer |
-
1984
- 1984-10-23 JP JP16073784U patent/JPS6175128U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6091640A (en) * | 1983-10-25 | 1985-05-23 | Mitsutoyo Mfg Co Ltd | Positioning device for wafer |