JPH0338U - - Google Patents
Info
- Publication number
- JPH0338U JPH0338U JP5788889U JP5788889U JPH0338U JP H0338 U JPH0338 U JP H0338U JP 5788889 U JP5788889 U JP 5788889U JP 5788889 U JP5788889 U JP 5788889U JP H0338 U JPH0338 U JP H0338U
- Authority
- JP
- Japan
- Prior art keywords
- wire bonding
- fixing
- vacuum chuck
- substrate
- chuck hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
Landscapes
- Wire Bonding (AREA)
Description
第１図は、本考案のワイヤーボンデイング用テ
ーブルを示す斜視図。第２図ａは、本考案のワイ
ヤーボンデイング用テーブルに設けられたドーナ
ツ状の真空チヤツク穴の平面図。第２図ｂは、ド
ーナツ状の真空チヤツク穴の断面図。第３図は、
ワイヤーボンデイング箇所を３箇所有するライン
センサの基板の平面図。第４図ａ，ｂ及びｃは、
第３図に示された基板を、本考案のワイヤーボン
デイング用テーブル上でワイヤーボンデイングす
る様子を示す側面図。第５図は、本考案のワイヤ
ーボンデイング用テーブルで、基板を複数同時に
テーブル上に固定できるテーブルを示す斜視図。
第６図は、従来のワイヤーボンデイング用テーブ
ルを示す側面図。
１…テーブル、２…ドーナツ状の真空チヤツク
穴、３…左側補助真空チヤツク穴、４…右側補助
真空チヤツク穴、５…中心部、６…周辺部、７…
真空穴、８…基板、９…左側ボンデイング箇所、
１０…中央ボンデイング箇所、１１…右側ボンデ
イング箇所、１２…真空チヤツク穴を複数列有す
るテーブル、１３…真空チヤツク穴。
FIG. 1 is a perspective view showing the wire bonding table of the present invention. FIG. 2a is a plan view of a donut-shaped vacuum chuck hole provided in the wire bonding table of the present invention. FIG. 2b is a sectional view of a donut-shaped vacuum chuck hole. Figure 3 shows
FIG. 3 is a plan view of a board of a line sensor having three wire bonding locations. Figure 4 a, b and c are
FIG. 4 is a side view showing how the substrate shown in FIG. 3 is wire bonded on the wire bonding table of the present invention; FIG. 5 is a perspective view showing a wire bonding table of the present invention, which can simultaneously fix a plurality of substrates on the table.
FIG. 6 is a side view showing a conventional wire bonding table. 1... Table, 2... Donut-shaped vacuum chuck hole, 3... Left side auxiliary vacuum chuck hole, 4... Right side auxiliary vacuum chuck hole, 5... Center, 6... Periphery, 7...
Vacuum hole, 8... Board, 9... Left side bonding point,
10...Central bonding location, 11...Right side bonding location, 12...Table having multiple rows of vacuum chuck holes, 13...Vacuum chuck holes.
Claims (1)
るワイヤーボンデイング用テーブルにおいて、少
なくとも中心部に基板固定用のドーナツ状の真空
チヤツク穴と、前記真空チヤツク穴の左右両側に
基板固定用の補助真空穴を有することを特徴とす
るワイヤーボンデイング用テーブル。 A wire bonding table used for fixing a substrate during wire bonding has a donut-shaped vacuum chuck hole for fixing the substrate at least in the center, and auxiliary vacuum holes for fixing the substrate on both left and right sides of the vacuum chuck hole. A wire bonding table featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5788889U JPH0338U (en) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5788889U JPH0338U (en) | 1989-05-19 | 1989-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338U true JPH0338U (en) | 1991-01-07 |
Family
ID=31583004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5788889U Pending JPH0338U (en) | 1989-05-19 | 1989-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013038U (en) * | 1983-07-06 | 1985-01-29 | クリ−ン工業株式会社 | hand wash cabinet |
| JPS6013039U (en) * | 1983-07-06 | 1985-01-29 | クリ−ン工業株式会社 | hand wash cabinet |
-
1989
- 1989-05-19 JP JP5788889U patent/JPH0338U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013038U (en) * | 1983-07-06 | 1985-01-29 | クリ−ン工業株式会社 | hand wash cabinet |
| JPS6013039U (en) * | 1983-07-06 | 1985-01-29 | クリ−ン工業株式会社 | hand wash cabinet |