JPS6450050U - - Google Patents
Info
- Publication number
- JPS6450050U JPS6450050U JP1987142582U JP14258287U JPS6450050U JP S6450050 U JPS6450050 U JP S6450050U JP 1987142582 U JP1987142582 U JP 1987142582U JP 14258287 U JP14258287 U JP 14258287U JP S6450050 U JPS6450050 U JP S6450050U
- Authority
- JP
- Japan
- Prior art keywords
- polishing holder
- protrusion
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 description 1
Description
第１図は本考案の一実施例を示す斜視図、第２
図は第１図に示す研磨ホルダの断面図、第３図は
従来の一例を示す斜視図、第４図は第３図の断面
図である。
１，４……ホルダ、２……接着剤層、３……基
板。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The drawings are a sectional view of the polishing holder shown in FIG. 1, FIG. 3 is a perspective view of a conventional example, and FIG. 4 is a sectional view of FIG. 3. 1, 4...Holder, 2...Adhesive layer, 3...Substrate.
Claims (1)
て、該研磨ホルダの半導体基板保持部を突出させ
た突出部を備なえることを特徴とする研磨ホルダ
。 What is claimed is: 1. A polishing holder for holding a plurality of semiconductor substrates, the polishing holder comprising a protrusion from which a semiconductor substrate holding portion of the polishing holder protrudes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987142582U JPS6450050U (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987142582U JPS6450050U (en) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6450050U true JPS6450050U (en) | 1989-03-28 |
Family
ID=31408666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987142582U Pending JPS6450050U (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450050U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112021006862T5 (en) | 2021-01-21 | 2023-11-02 | Fuji Corporation | Component mounting device and method for correcting the position of terminals |
-
1987
- 1987-09-18 JP JP1987142582U patent/JPS6450050U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112021006862T5 (en) | 2021-01-21 | 2023-11-02 | Fuji Corporation | Component mounting device and method for correcting the position of terminals |