JPH0377447U - - Google Patents
Info
- Publication number
- JPH0377447U JPH0377447U JP13745189U JP13745189U JPH0377447U JP H0377447 U JPH0377447 U JP H0377447U JP 13745189 U JP13745189 U JP 13745189U JP 13745189 U JP13745189 U JP 13745189U JP H0377447 U JPH0377447 U JP H0377447U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- plate
- wafers
- bonding
- shaped jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 description 1
Description
第１図はこの考案の一実施例を示す研摩後ウエ
ーハ用貼着治具の斜視図である。第２図は治具に
ウエーハをワツクスにて貼り付けた状態を表し、
第３図にａ−ａ′線に沿う断面図を示している。
第４図は従来のウエーハ貼着治具の斜視図、第５
図は、従来使用している研摩後ウエーハ治具にウ
エーハをワツクスで貼り付けた状態を表し、第６
図は、ｂ−ｂ′線に沿う断面図を示している。
１……貼着治具、２……貼着面、３……凸部、
４……凹部、５……ウエーハ、６……ワツクス。
FIG. 1 is a perspective view of a bonding jig for polished wafers showing an embodiment of this invention. Figure 2 shows the wafer attached to the jig with wax.
FIG. 3 shows a sectional view taken along line a-a'.
Figure 4 is a perspective view of a conventional wafer bonding jig;
The figure shows the wafer attached with wax to the conventionally used post-polishing wafer jig.
The figure shows a sectional view along line bb'. 1... Adhesive jig, 2... Adhesive surface, 3... Convex part,
4... recess, 5... wafer, 6... wax.
Claims (1)
る板状治具において、 上記板状治具の貼着面を、周期的な凹凸面に形
成したことを特徴とするウエーハ加工用貼着治具
。[Claims for Utility Model Registration] A plate-shaped jig for bonding wafers in order to process the wafers, characterized in that the bonding surface of the plate-shaped jig is formed into a periodically uneven surface. Adhesive jig for wafer processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13745189U JPH0377447U (en) | 1989-11-28 | 1989-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13745189U JPH0377447U (en) | 1989-11-28 | 1989-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377447U true JPH0377447U (en) | 1991-08-05 |
Family
ID=31684607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13745189U Pending JPH0377447U (en) | 1989-11-28 | 1989-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377447U (en) |
-
1989
- 1989-11-28 JP JP13745189U patent/JPH0377447U/ja active Pending