JPH0487629U - - Google Patents
Info
- Publication number
- JPH0487629U JPH0487629U JP13020690U JP13020690U JPH0487629U JP H0487629 U JPH0487629 U JP H0487629U JP 13020690 U JP13020690 U JP 13020690U JP 13020690 U JP13020690 U JP 13020690U JP H0487629 U JPH0487629 U JP H0487629U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- spacing
- grooves
- supports
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
Description
第１図はこの考案の一実施例であるボートの側
断面図、第２図は従来およびこの考案共通の半導
体製造装置の断面図である。
図において、３ａ，３ｂは半導体基板、４はボ
ート、２１はボートを構成する支柱、２２は半導
体基板３ａ，３ｂを支持するための溝を示す。な
お、図中、同一符号は同一、又は相当部分を示す
。
FIG. 1 is a side sectional view of a boat which is an embodiment of this invention, and FIG. 2 is a sectional view of a semiconductor manufacturing apparatus common to the conventional and this invention. In the figure, 3a and 3b are semiconductor substrates, 4 is a boat, 21 is a support that constitutes the boat, and 22 is a groove for supporting the semiconductor substrates 3a and 3b. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ト位置によつて適正化したことを特徴とする半導
体製造装置。 A semiconductor manufacturing device characterized in that the spacing between grooves of a boat that supports a semiconductor substrate is optimized depending on the boat position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13020690U JPH0487629U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13020690U JPH0487629U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487629U true JPH0487629U (en) | 1992-07-30 |
Family
ID=31877566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13020690U Pending JPH0487629U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487629U (en) |
-
1990
- 1990-11-30 JP JP13020690U patent/JPH0487629U/ja active Pending