JPH0477254U - - Google Patents
Info
- Publication number
- JPH0477254U JPH0477254U JP12031390U JP12031390U JPH0477254U JP H0477254 U JPH0477254 U JP H0477254U JP 12031390 U JP12031390 U JP 12031390U JP 12031390 U JP12031390 U JP 12031390U JP H0477254 U JPH0477254 U JP H0477254U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- guide
- supporter
- slidable
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、この発明のウエハガイドを放射状の
ウエハ支持器に取りつけた一例を示す平面図及び
正面図、第２図は、この発明のウエハガイドを放
射状のウエハ支持器に取りつけた一例の要部を示
す放射図、第３図は、ウエハガイド２及びウエハ
支持器１の係合手段の一例を示す断面図、第４図
は、この発明に従うウエハガイドの別の例を示す
正面図である。
FIG. 1 is a plan view and a front view showing an example of a wafer guide of the present invention attached to a radial wafer support, and FIG. 2 is a schematic view of an example of the wafer guide of the present invention attached to a radial wafer support. 3 is a sectional view showing an example of the engagement means of the wafer guide 2 and the wafer supporter 1, and FIG. 4 is a front view showing another example of the wafer guide according to the present invention. .
Claims (1)
え、このウエハをウエハ支持器へ装着するための
ガイドであつて、 上記ウエハ支持器に対してウエハ主表面に沿う
方向にスライド可能な係合手段をそなえることを
特徴とするウエハガイド。[Scope of Claim for Utility Model Registration] A guide for mounting the wafer on a wafer supporter, which is provided with grooves for holding the wafer in its thickness direction, and that extends in the direction along the main surface of the wafer with respect to the wafer supporter. A wafer guide characterized in that it is provided with an engaging means that is slidable on the wafer guide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12031390U JPH0477254U (en) | 1990-11-19 | 1990-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12031390U JPH0477254U (en) | 1990-11-19 | 1990-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477254U true JPH0477254U (en) | 1992-07-06 |
Family
ID=31868224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12031390U Pending JPH0477254U (en) | 1990-11-19 | 1990-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477254U (en) |
-
1990
- 1990-11-19 JP JP12031390U patent/JPH0477254U/ja active Pending
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