JPH0270429U - - Google Patents
Info
- Publication number
- JPH0270429U JPH0270429U JP15023888U JP15023888U JPH0270429U JP H0270429 U JPH0270429 U JP H0270429U JP 15023888 U JP15023888 U JP 15023888U JP 15023888 U JP15023888 U JP 15023888U JP H0270429 U JPH0270429 U JP H0270429U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- mounting table
- wheels
- sled
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の一実施例の正面図、第２図は
従来の半導体装置製造用石英そりの一例の正面図
である。
１……石英そり、２……車輪、３……石英ボー
ト、４……ウエーハ、５……フエンダー。
FIG. 1 is a front view of an embodiment of the present invention, and FIG. 2 is a front view of an example of a conventional quartz sled for manufacturing semiconductor devices. 1...Quartz sled, 2...Wheel, 3...Quartz boat, 4...Wafer, 5...Fender.
Claims (1)
置する平坦な面を有する載置台と、該載置台の両
側の前後に設けられた少くとも四つの車輪と、該
車輪の各々の上部に設けられたフエンダーとを有
する半導体装置製造用石英そり。 A mounting table having a flat surface on which a quartz board for holding a plurality of semiconductor wafers is placed, at least four wheels provided at the front and back on both sides of the mounting table, and fenders provided at the top of each of the wheels. A quartz sled for semiconductor device manufacturing, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023888U JPH0270429U (en) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023888U JPH0270429U (en) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270429U true JPH0270429U (en) | 1990-05-29 |
Family
ID=31423201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023888U Pending JPH0270429U (en) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270429U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017115573A1 (en) * | 2015-12-28 | 2017-07-06 | 三菱電機株式会社 | Horizontal diffusion furnace and solar cell production method |
-
1988
- 1988-11-17 JP JP15023888U patent/JPH0270429U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017115573A1 (en) * | 2015-12-28 | 2017-07-06 | 三菱電機株式会社 | Horizontal diffusion furnace and solar cell production method |