JPS642442U - - Google Patents
Info
- Publication number
- JPS642442U JPS642442U JP9579787U JP9579787U JPS642442U JP S642442 U JPS642442 U JP S642442U JP 9579787 U JP9579787 U JP 9579787U JP 9579787 U JP9579787 U JP 9579787U JP S642442 U JPS642442 U JP S642442U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- robot
- wafers
- exhaust hole
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Description
第１図はこの考案の一実施例によるウエハ取り
出し装置を示す断面図、第２図は従来のウエハ取
り出し装置を示す断面図である。
図において、１はウエハ、２はカセツト、３は
Ｈ面、４，１４はボールネジ、５は駆動モータ、
６，１０，１２はロボツト、７，８，９はベルト
、１１，１３は排気孔である。なお、各図中同一
符号は同一又は相当部分を示す。
FIG. 1 is a cross-sectional view showing a wafer take-out device according to an embodiment of this invention, and FIG. 2 is a cross-sectional view showing a conventional wafer take-out device. In the figure, 1 is a wafer, 2 is a cassette, 3 is an H surface, 4 and 14 are ball screws, 5 is a drive motor,
6, 10, 12 are robots, 7, 8, 9 are belts, and 11, 13 are exhaust holes. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
ツトを上下させる第１のロボツト、ウエハをカセ
ツトから取り出し、排気孔を有する第２のロボツ
ト、取り出されたウエハを受け取り、排気孔を有
する第３のロボツトを備えたウエハ取り出し装置
。 A cassette with a groove containing wafers, a first robot that moves the cassette up and down, a second robot that takes out the wafers from the cassette and has an exhaust hole, and a third robot that receives the taken out wafers and has an exhaust hole. Equipped with a wafer unloading device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9579787U JPS642442U (en) | 1987-06-22 | 1987-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9579787U JPS642442U (en) | 1987-06-22 | 1987-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642442U true JPS642442U (en) | 1989-01-09 |
Family
ID=31320515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9579787U Pending JPS642442U (en) | 1987-06-22 | 1987-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642442U (en) |
-
1987
- 1987-06-22 JP JP9579787U patent/JPS642442U/ja active Pending