JPH0448632U - - Google Patents
Info
- Publication number
- JPH0448632U JPH0448632U JP9028590U JP9028590U JPH0448632U JP H0448632 U JPH0448632 U JP H0448632U JP 9028590 U JP9028590 U JP 9028590U JP 9028590 U JP9028590 U JP 9028590U JP H0448632 U JPH0448632 U JP H0448632U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport section
- horizontal transport
- wafer holding
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000001514 detection method Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図はこの考案の第１の実施例のウエーハ搬
送機構の斜視図、第２図ａは第１図をレール横か
ら水平方向に見た側面図で、ウエーハを右方向に
加速しているときのものである。第２図ｂは同じ
くウエーハを左方向に加速しているときの側面図
である。第３図はこの考案の第２の実施例の斜視
図である。第４図は従来のウエーハ搬送機構の斜
視図である。
１……ウエーハ搬送部、２……固定ウエーハ保
持ピン、３ａ，３ｂ……可動ウエーハ保持ピン、
４……シリコンゴム、５……ローラ、６……レー
ル、７……ウエーハ検知センサ、８……ウエーハ
、９……基台、１０ａ，１０ｂ……ロボツトアー
ム、１１……ウエーハ保持部、１２……ウエーハ
検知センサ、１３……軸。
Figure 1 is a perspective view of the wafer transport mechanism of the first embodiment of this invention, and Figure 2a is a side view of Figure 1 viewed horizontally from the side of the rail, accelerating the wafer to the right. It is from the time. FIG. 2b is a side view of the wafer being accelerated to the left. FIG. 3 is a perspective view of a second embodiment of this invention. FIG. 4 is a perspective view of a conventional wafer transport mechanism. 1...Wafer transport unit, 2...Fixed wafer holding pin, 3a, 3b...Movable wafer holding pin,
4... Silicon rubber, 5... Roller, 6... Rail, 7... Wafer detection sensor, 8... Wafer, 9... Base, 10a, 10b... Robot arm, 11... Wafer holding part, 12 ...Wafer detection sensor, 13...axis.
Claims (1)
られてウエーハを載置する複数のウエーハ保持ピ
ンを有するウエーハ保持部と、前記ウエーハ保持
ピンに載置されたウエーハを加速度を受ける方向
と同方向の側が低くなるようにウエーハ保持部を
制御する駆動部とを有するウエーハの搬送機構。 a wafer holder having a horizontal transport section, a wafer holder having a plurality of wafer holding pins that are attached to the horizontal transport section and on which wafers are placed; A wafer transport mechanism having a drive unit that controls a wafer holding unit so that the side thereof is lowered.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028590U JPH0448632U (en) | 1990-08-28 | 1990-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9028590U JPH0448632U (en) | 1990-08-28 | 1990-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448632U true JPH0448632U (en) | 1992-04-24 |
Family
ID=31824903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9028590U Pending JPH0448632U (en) | 1990-08-28 | 1990-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448632U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020015605A (en) * | 2018-07-27 | 2020-01-30 | シブヤパッケージングシステム株式会社 | Content popping-out prevention mechanism in vessel transfer device |
-
1990
- 1990-08-28 JP JP9028590U patent/JPH0448632U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020015605A (en) * | 2018-07-27 | 2020-01-30 | シブヤパッケージングシステム株式会社 | Content popping-out prevention mechanism in vessel transfer device |