JPS63194835U - - Google Patents
Info
- Publication number
- JPS63194835U JPS63194835U JP8762387U JP8762387U JPS63194835U JP S63194835 U JPS63194835 U JP S63194835U JP 8762387 U JP8762387 U JP 8762387U JP 8762387 U JP8762387 U JP 8762387U JP S63194835 U JPS63194835 U JP S63194835U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- boat
- cassette
- rolling
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005096 rolling process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Special Conveying (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図はこの考案の一実施例を示す半導体ウエ
ハの移し替え装置の位置調整治具の使用態様を示
す正面図、第２図は従来の半導体ウエハの移し替
え装置の位置調整方法を示す正面図である。
図において、２はカセツト、３はボート、４は
移し替えレール、５は揺動アーム、６はＶ溝ロー
ラ、７はＶ溝ローラ、８はスライダ、２１は位置
調整治具である。尚、図中同一符号は同一又は相
当部分を示す。
Fig. 1 is a front view showing how the position adjustment jig of a semiconductor wafer transfer device is used as an embodiment of this invention, and Fig. 2 is a front view showing a position adjustment method of a conventional semiconductor wafer transfer device. It is a diagram. In the figure, 2 is a cassette, 3 is a boat, 4 is a transfer rail, 5 is a swing arm, 6 is a V-groove roller, 7 is a V-groove roller, 8 is a slider, and 21 is a position adjustment jig. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
えレールを配設すると共に、上記カセツトからボ
ートへ移し替えレールを介して半導体ウエハを転
動させるための揺動アームと、上記半導体ウエハ
が上記移し替えレールを転動途中に支持しながら
上記ボート上へ案内するスライダとを備え、半導
体ウエハを１枚ずつ移し替える装置において、上
記揺動アーム、カセツト、移し替えレール、ボー
ト、スライダの各溝に同時に接触する外形を備え
た半導体ウエハ移し替え装置の位置調整治具。 A semiconductor wafer transfer rail is disposed between the cassette and the boat, and a swinging arm for rolling the semiconductor wafers from the cassette to the boat via the transfer rail; A device for transferring semiconductor wafers one by one, which is equipped with a slider that guides the semiconductor wafers onto the boat while supporting the semiconductor wafers in the middle of rolling. A position adjustment jig for semiconductor wafer transfer equipment with an external shape that allows
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8762387U JPS63194835U (en) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8762387U JPS63194835U (en) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63194835U true JPS63194835U (en) | 1988-12-15 |
Family
ID=30945001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8762387U Pending JPS63194835U (en) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63194835U (en) |
-
1987
- 1987-06-05 JP JP8762387U patent/JPS63194835U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63194835U (en) | ||
| JPS63195720U (en) | ||
| JPS60146339U (en) | Semiconductor wafer heat treatment equipment | |
| JPS6331536U (en) | ||
| JPS63195734U (en) | ||
| JPS59115648U (en) | Semiconductor wafer transfer equipment | |
| JPS63177035U (en) | ||
| JPH0328735U (en) | ||
| JPH03128943U (en) | ||
| JPS59195741U (en) | Wafer transfer device | |
| JPH0448632U (en) | ||
| JPS60169838U (en) | semiconductor manufacturing equipment | |
| JPH0412647U (en) | ||
| JPS63137938U (en) | ||
| JPH01167046U (en) | ||
| JPH0184433U (en) | ||
| JPS60927U (en) | Semiconductor wafer pasting equipment | |
| JPH0189744U (en) | ||
| JPS63121426U (en) | ||
| JPH01165646U (en) | ||
| JPS6053U (en) | Processing equipment for hollow thin-walled rotating bodies | |
| JPS63105335U (en) | ||
| JPH0193736U (en) | ||
| JPS59111042U (en) | semiconductor manufacturing equipment | |
| JPS62152429U (en) |