JPH0412647U - - Google Patents
Info
- Publication number
- JPH0412647U JPH0412647U JP5345590U JP5345590U JPH0412647U JP H0412647 U JPH0412647 U JP H0412647U JP 5345590 U JP5345590 U JP 5345590U JP 5345590 U JP5345590 U JP 5345590U JP H0412647 U JPH0412647 U JP H0412647U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- fixing
- semiconductor
- fixing jig
- device manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Description
第1図a〜cは本考案の一実施例の断面概略図
、第2図a,bは従来技術の断面概略図である。
101……半導体ウエーハ(サイズA)、10
2,103……半導体ウエーハ固定用クランパー
、104……半導体装置製造装置処理台、107
……クランパーアームB用溝、108……クラン
パーアームB、109……クランパーアームA、
110……半導体ウエーハ(サイズB)、201
……半導体ウエーハ、202,203……半導体
ウエーハ固定用クランパー(サイズA用)、20
4……半導体製造装置処理台、207……半導体
ウエーハ(サイズB)、208,209……半導
体ウエーハ固定用クランパー(サイズB用)。
1A to 1C are schematic cross-sectional views of one embodiment of the present invention, and FIGS. 2A and 2B are schematic cross-sectional views of the prior art. 101...Semiconductor wafer (size A), 10
2,103... Semiconductor wafer fixing clamper, 104... Semiconductor device manufacturing equipment processing table, 107
...Groove for clamper arm B, 108...Clamper arm B, 109...Clamper arm A,
110...Semiconductor wafer (size B), 201
... Semiconductor wafer, 202, 203 ... Clamper for fixing semiconductor wafer (for size A), 20
4... Semiconductor manufacturing equipment processing table, 207... Semiconductor wafer (size B), 208, 209... Semiconductor wafer fixing clamper (for size B).
Claims (1)
の製造装置において、固定治具はサイズの異なる
半導体ウエーハを固定できる機構を有することを
特徴とする半導体装置の製造装置。 1. A semiconductor device manufacturing apparatus having a semiconductor wafer fixing jig, wherein the fixing jig has a mechanism capable of fixing semiconductor wafers of different sizes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5345590U JPH0412647U (en) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5345590U JPH0412647U (en) | 1990-05-22 | 1990-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0412647U true JPH0412647U (en) | 1992-01-31 |
Family
ID=31574654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5345590U Pending JPH0412647U (en) | 1990-05-22 | 1990-05-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0412647U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53126589U (en) * | 1977-03-17 | 1978-10-07 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160539B2 (en) * | 1981-04-15 | 1989-12-22 | Ebara Mfg |
-
1990
- 1990-05-22 JP JP5345590U patent/JPH0412647U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160539B2 (en) * | 1981-04-15 | 1989-12-22 | Ebara Mfg |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53126589U (en) * | 1977-03-17 | 1978-10-07 |
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