JPS6331536U - - Google Patents
Info
- Publication number
- JPS6331536U JPS6331536U JP12529086U JP12529086U JPS6331536U JP S6331536 U JPS6331536 U JP S6331536U JP 12529086 U JP12529086 U JP 12529086U JP 12529086 U JP12529086 U JP 12529086U JP S6331536 U JPS6331536 U JP S6331536U
- Authority
- JP
- Japan
- Prior art keywords
- transfer rail
- semiconductor wafer
- boat
- cassette
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000005096 rolling process Methods 0.000 claims 2
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図はこの考案の一実施例の一部断面正面図
、第２図は第１図の―線に沿う平面での断面
図、第３図は従来の半導体ウエハの移し替え装置
の一部断面正面図である。
１……半導体ウエハ、２……カセツト、３……
ボート、５……揺動アーム、８……スライダ、１
０……移し替えレール、１０ｅ〜１０ｍ……ガイ
ド溝、１４……エアシリンダ（移動手段）。なお
、各図中、同一符号は同一または相当部分を示す
。
Fig. 1 is a partially sectional front view of an embodiment of this invention, Fig. 2 is a sectional view taken along the line - in Fig. 1, and Fig. 3 is a part of a conventional semiconductor wafer transfer device. It is a cross-sectional front view. 1... Semiconductor wafer, 2... Cassette, 3...
Boat, 5... Swinging arm, 8... Slider, 1
0... Transfer rail, 10e to 10m... Guide groove, 14... Air cylinder (transfer means). In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
×ｎ組（ｎ＝２，３，４，…）のガイド溝が形成
されている移し替えレールと、前記カセツトから
前記ボートへ前記移し替えレールを介して半導体
ウエハを転動させるための揺動アームと、前記半
導体ウエハが前記移し替えレールを転動途中に支
持しながら前記ボート上へ案内するスライダと、
前記移し替えレールを前記半導体ウエハの移動方
向と直角に移動させるための移動手段とを備えて
なる半導体ウエハの移し替え装置。 2 located between the cassette and the boat and facing each other.
A transfer rail in which ×n sets (n=2, 3, 4, ...) of guide grooves are formed, and a swing for rolling semiconductor wafers from the cassette to the boat via the transfer rail. an arm, and a slider for guiding the semiconductor wafer onto the boat while supporting the transfer rail during rolling;
A semiconductor wafer transfer apparatus comprising a moving means for moving the transfer rail perpendicular to the moving direction of the semiconductor wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12529086U JPS6331536U (en) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12529086U JPS6331536U (en) | 1986-08-18 | 1986-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331536U true JPS6331536U (en) | 1988-03-01 |
Family
ID=31018058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12529086U Pending JPS6331536U (en) | 1986-08-18 | 1986-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331536U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008042155A (en) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | Auxiliary device of wafer cassette |
-
1986
- 1986-08-18 JP JP12529086U patent/JPS6331536U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008042155A (en) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | Auxiliary device of wafer cassette |
| JP4496194B2 (en) * | 2006-08-04 | 2010-07-07 | 京元電子股▲ふん▼有限公司 | Wafer cassette auxiliary equipment |