JPH0459144U - - Google Patents
Info
- Publication number
- JPH0459144U JPH0459144U JP10104490U JP10104490U JPH0459144U JP H0459144 U JPH0459144 U JP H0459144U JP 10104490 U JP10104490 U JP 10104490U JP 10104490 U JP10104490 U JP 10104490U JP H0459144 U JPH0459144 U JP H0459144U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped conductor
- contact
- measured
- probe head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 8
- 239000000523 sample Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案によるプローブヘツドの一実施
例を示す側面図、第２図は同プローブヘツドの平
面図、第３図ａ，ｂは従来のプローブヘツドの一
構成例を示す図である。
１ａ……第１の板状導体、１ｂ……第２の板状
導体、３……第１の接点、４……第２の接点、Ｗ
……被測定物（半導体ウエーハ）。
FIG. 1 is a side view showing an embodiment of the probe head according to the present invention, FIG. 2 is a plan view of the same probe head, and FIGS. 3a and 3b are diagrams showing an example of the configuration of a conventional probe head. 1a...First plate-shaped conductor, 1b...Second plate-shaped conductor, 3...First contact, 4...Second contact, W
...Object to be measured (semiconductor wafer).
Claims (1)
１の板状導体１ａと、前記被測定物の鉛直方向に
前記第１の板状導体と並ぶように縦列配置された
第２の板状導体１ｂと、前記第１の板状導体ある
いは第２の板状導体の何れかに接触して設けられ
た第２の接点４とを備えたことを特徴とするプロ
ーブヘツド。 A first plate-shaped conductor 1a having a first contact point 3 that comes into contact with and separates from the object to be measured W, and a second plate-shaped conductor 1a arranged in tandem with the first plate-shaped conductor in the vertical direction of the object to be measured. A probe head comprising a plate-shaped conductor 1b and a second contact 4 provided in contact with either the first plate-shaped conductor or the second plate-shaped conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101044U JP2531042Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101044U JP2531042Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459144U true JPH0459144U (en) | 1992-05-21 |
| JP2531042Y2 JP2531042Y2 (en) | 1997-04-02 |
Family
ID=31844168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990101044U Expired - Lifetime JP2531042Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531042Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102037657B1 (en) * | 2018-09-05 | 2019-10-29 | 주식회사 아이에스시 | Probe card for electrical test and probe head for probe card |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (en) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (en) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Probe card |
| JPH01124576U (en) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (en) * | 1988-06-13 | 1990-01-05 |
-
1990
- 1990-09-28 JP JP1990101044U patent/JP2531042Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (en) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (en) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Probe card |
| JPH01124576U (en) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (en) * | 1988-06-13 | 1990-01-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531042Y2 (en) | 1997-04-02 |