JPH0459145U

JPH0459145U -

Info

Publication number: JPH0459145U
Application number: JP10104590U
Authority: JP
Priority date: 1990-09-28
Filing date: 1990-09-28
Publication date: 1992-05-21

Description

[Brief explanation of the drawing]

第１図ａは本考案によるプローブヘツドの調整
機構の一実施例を示す側面図、第１図ｂは同平面
図、第２図ａ，ｂは、本考案の変形例を示す側面
図及び平面図、第３図は本考案のさらに他の変形
例を示す側面図、第４図ａ，ｂは従来のプローブ
ヘツドの一構成例を示す平面図及び側面図である
。１ａ……第１の検出用導体、１ｂ……第２の検
出用導体、３……第１の接点、４……第２の接点
、７……スリツト、８……調整ネジ、Ｗ……被測
定物（半導体ウエーハ）。 FIG. 1a is a side view showing an embodiment of the probe head adjustment mechanism according to the present invention, FIG. 1b is a plan view of the same, and FIGS. 3 are a side view showing still another modification of the present invention, and FIGS. 4a and 4b are a plan view and a side view showing an example of the configuration of a conventional probe head. 1a...First detection conductor, 1b...Second detection conductor, 3...First contact, 4...Second contact, 7...Slit, 8...Adjustment screw, W... Object to be measured (semiconductor wafer).

Claims

[Claims for Utility Model Registration] A mounting base 5 made of an insulating material and having a slit 7 formed in a horizontal direction perpendicular to the direction of movement, and an adjustment screw 8 for adjusting the spacing between the slits of the mounting base.
a first detection conductor 1a having a first contact point 3 that comes into contact with and separating from the object to be measured W and fixed to one side of the slit of the mounting base; a second detection conductor 1b arranged in line with the first detection conductor and fixed to the other side of the slit of the mounting base; and a second detection conductor 1b provided on either the first detection conductor or the second detection conductor. A probe head adjustment mechanism comprising: a second contact point 4;