JPS6141971A - Probe provided with stylus force measuring function - Google Patents

Abstract

PURPOSE:To eliminate variance of stylus force by detecting a direct reading value or its absolute value of stylus force by a probe and adjusting the stylus force at any time. CONSTITUTION:In probing an object to be measured, if the tip of the body 2 of the probe is brought into contact with the object and thrusted, a stylus force transmitting part 3 is pushed up by elastic deformation of the body of the probe 2 and brought into contact with a pressure sensitive element 4 and pressed. At this time, force F1 applied onto the contact face of the element 4 is force received by the tip of the body of the probe 2, i.e. stylus force F, minus force F2 required to push up the stylus force transmitting part 3 to the position of contact face of the element 4. Accordingly, an output from the element 4 corresponds to F-F2, and when F2 is measured beforehand, an absolute value of stylus force F of the probe is obtained by correcting the output. Thus, stylus force can be adjusted accurately, and variance of measured values due to scattering of stylus force can be minimized.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a glove equipped with a stylus pressure measurement function, and in particular, when measuring the characteristics of an object to be measured through contact between the tip of the glove and the object to be measured, it is possible to measure the contact pressure at the tip of the probe. The present invention relates to a probe with a stylus pressure measurement function that can simultaneously detect stylus pressure.

As a means of measuring the characteristics of electronic circuit boards, etc., it is known to place a globe on the electrode inside the board. The influence of the contact pressure with the probe, that is, the needle pressure of the probe, on the measured value cannot be ignored. Therefore, in order to perform highly accurate measurements, it is necessary to minimize variations in stylus pressure and to keep it constant, and for this purpose, stylus B must be constantly monitored. Measuring stylus pressure at any time is a time-consuming task.

Therefore, the probe itself has a stylus pressure measurement function,
It is desirable to measure the stylus pressure while probing. Conventionally, there have been probes that have a function to determine whether stylus pressure above a certain level is being applied during measurement, but since it is not possible to know the absolute value of stylus pressure, there may be variations in stylus pressure between multiple probes. could not be eliminated.

The present invention allows the stylus pressure to be adjusted at any time by providing a stylus pressure measurement function section on the glove itself that enables direct reading of the stylus pressure or detection of its absolute value. The purpose is to provide a probe that can eliminate variations.

A probe with a stylus pressure measurement function according to the present invention includes a probe holder attached to a position adjustable, a probe body fixed to the probe, and a side opposite to the tip of the probe body directly above the holder, that is, It has a pressure sensitive element attached at a position facing the stylus pressure transmitting section on the back side, and when the tip of the probe body contacts the object to be measured, the stylus pressure transmitting section on the probe body responds to the pressure sensitive element. It is designed to be pressed against the element.

Hereinafter, the present invention will be described in detail with reference to the drawings.

The drawing is a side sectional view of a probe with a needle pressure measurement function according to an embodiment of the present invention. A probe holder IVC is attached to a suitable stable base so that its position can be adjusted (described later), and the proximal end of the probe body 2 is fixed in a cantilevered manner. The other end of the probe body 2 is bent into an L shape, and its tip comes into contact with an object to be measured (not shown) K to perform probing. The curved back portion of the tip of the probe body 2 on the opposite side from the object to be measured serves as a needle pressure transmitting section 3, and a pressure sensitive part is placed on the holder 1 facing the needle pressure transmitting section 3. Element 4 is attached. The pressure sensitive element 4 and the stylus pressure transmitting section 3 need to be spaced appropriately to absorb the impact when the tip of the probe body 2 comes into contact with the object to be measured. An adjusting screw 5 is screwed into the holder 1 near the end, and the tip of the screw 5 abuts the probe body 2 to maintain the above-mentioned proper spacing.

The probe holder 1 has an elongated hole 8 and a screw hole 9 formed in the attachment part to the base, and an adjustment screw 7 is screwed into the base through the entire elongated hole 8 and screwed into the screw hole 9. The tip of the other adjusting screw 6 is brought into contact with the base. By tightening these adjustment screws 6 and 7, the shive lobe holder 1 is firmly fixed to the base, and by loosening these screws 6 and 7, one adjustment screw 7 can be removed from the base. The entire holder can be moved within the range of the elongated hole 8 without being pulled out, thereby adjusting the position of the tip of the probe body 2.

In such a configuration, when the tip of the probe body 2 contacts and presses the object to be measured during probing of the object to be measured, the stylus pressure transmitting section 3 is pushed up due to elastic deformation of the probe main body 2, and the pressure sensitive element 4 be touched and pressed against. At this time, the force Fl applied to the contact surface of the pressure sensitive element 4 is determined from the force applied to the tip of the probe body 2, that is, the stylus pressure F, which is necessary to push the stylus pressure transmitting section 3 up to the position of the contact surface of the pressure sensitive element 4. It becomes the result minus the force F2. Therefore, pressure sensitive element 4
The output from K corresponds to F - Fz K, and by measuring F2 in advance, the absolute value of the probe stylus pressure F can be obtained by calibrating this output.

This allows accurate adjustment of the stylus pressure and minimizes the variation in measured values caused by variations in stylus pressure.
Also, the stylus pressure will naturally change if the thickness of the substrate changes, but it is possible to keep the stylus pressure constant by feeding back the output of the pressure-sensitive element to the probe mount or the vertical mechanism of the stage. .

[Brief explanation of drawings]

The drawing is a side sectional view of a probe with a needle pressure measurement function according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Probe holder, 2... Probe main body, 3... Needle pressure transmission part, 4... Pressure sensitive element,
5.6.7... Adjustment screw, 8... Oblong hole.

Claims (1)

[Claims] A probe holder equipped with an attachment position adjustment mechanism, a probe fixed to the holder in a cantilevered manner, and a probe attached to the holder at a position facing the stylus pressure transmission section on the back of the probe tip. A probe with a stylus pressure measurement function, characterized in that the probe has a pressure element, and is configured such that the stylus pressure transmitting section is pressed against the pressure sensitive element when the tip of the probe comes into contact with an object to be measured.