JPH03115866U - - Google Patents
Info
- Publication number
- JPH03115866U JPH03115866U JP2496890U JP2496890U JPH03115866U JP H03115866 U JPH03115866 U JP H03115866U JP 2496890 U JP2496890 U JP 2496890U JP 2496890 U JP2496890 U JP 2496890U JP H03115866 U JPH03115866 U JP H03115866U
- Authority
- JP
- Japan
- Prior art keywords
- transmission path
- signal transmission
- contact piece
- probe structure
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 7
- 230000008054 signal transmission Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
Description
第１図ａは、本考案によるプローブ構造の第１
実施例を示す平面図、第１図ｂは、同図ａのＡ−
Ａ線断面図、第１図ｃは、伝送線路の変形を示す
図、第２図は、同プローブ構造の第２実施例を示
す側断面図、第３図は、同プローブ構造の第３実
施例を示す側断面図、第４図ａ，ｂは、従来のプ
ローブを示す平面図、第４図ｂは、同図ａのＢ−
Ｂ線断面図、第５図は、従来のプローブの他の例
を示す斜視図、第６図は、従来のプローブのさら
に他の例を示す側面図である。
１……固定板、１ｂ……凸部、１ｃ……貫通孔
、２……基板、２ａ……空孔、２ｂ……溝部、２
ｃ……接触片、３……螺子、４……信号伝送路、
５……接点部、６……球体、１０……被測定物、
１０ａ……入出力端子。
FIG. 1a shows the first probe structure according to the present invention.
A plan view showing the embodiment, FIG. 1b, is A- in FIG.
A cross-sectional view taken along line A, FIG. 4a and 4b are plan views showing a conventional probe, and FIG. 4b is a side sectional view showing an example.
5 is a perspective view showing another example of the conventional probe, and FIG. 6 is a side view showing still another example of the conventional probe. DESCRIPTION OF SYMBOLS 1... Fixed plate, 1b... Convex part, 1c... Through hole, 2... Substrate, 2a... Hole, 2b... Groove, 2
c...Contact piece, 3...Screw, 4...Signal transmission path,
5... Contact portion, 6... Sphere, 10... Object to be measured,
10a...Input/output terminal.
Claims (1)
て該被測定物の特性を測定するプローブ構造であ
つて、 誘電体材質により板状に形成され、中央に空孔
２ａが設けられ、かつ該空孔の周囲に溝部２ｂに
より複数に分割された接触片２ｃとを有する基板
２と、 前記固定板の接触片の一面に各々設けられ、先
端に接点部５を有する膜状の信号伝送路４と、 前記接触片の角度を調整する角度調整手段３と
、 を有することを特徴とするプローブ構造。 (2) 前記信号伝送路が接触片２ｃ先端部で折り
返し状態の伝送路４′で成り、さらに折り返し部
分から接点部５までさらに信号伝送路を設けた請
求項１記載のプローブ構造。[Claims for Utility Model Registration] (1) A probe structure for measuring the characteristics of an object to be measured 10 by contacting the input/output terminal 10a of the object to be measured, which is formed into a plate shape from a dielectric material and has a central a substrate 2 having a hole 2a therein, and a contact piece 2c divided into a plurality of pieces by a groove 2b around the hole; 1. A probe structure comprising: a membrane-like signal transmission path 4 having a diameter of 5; and an angle adjustment means 3 for adjusting the angle of the contact piece. (2) The probe structure according to claim 1, wherein the signal transmission path comprises a transmission path 4' which is folded back at the tip of the contact piece 2c, and further a signal transmission path is provided from the folded portion to the contact portion 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990024968U JPH082617Y2 (en) | 1990-03-14 | 1990-03-14 | Probe structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990024968U JPH082617Y2 (en) | 1990-03-14 | 1990-03-14 | Probe structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115866U true JPH03115866U (en) | 1991-12-02 |
| JPH082617Y2 JPH082617Y2 (en) | 1996-01-29 |
Family
ID=31527914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990024968U Expired - Fee Related JPH082617Y2 (en) | 1990-03-14 | 1990-03-14 | Probe structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082617Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11258269A (en) * | 1998-03-09 | 1999-09-24 | Fujitsu Ltd | Contactor for semiconductor device |
| WO2006095759A1 (en) * | 2005-03-08 | 2006-09-14 | Tokyo Electron Limited | Method of forming connection pin, probe, connection pin, probe card, and method of producing probe card |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49135162A (en) * | 1973-05-02 | 1974-12-26 | ||
| JPH0252257A (en) * | 1988-08-16 | 1990-02-21 | Tokyo Electron Ltd | Probe device |
-
1990
- 1990-03-14 JP JP1990024968U patent/JPH082617Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49135162A (en) * | 1973-05-02 | 1974-12-26 | ||
| JPH0252257A (en) * | 1988-08-16 | 1990-02-21 | Tokyo Electron Ltd | Probe device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11258269A (en) * | 1998-03-09 | 1999-09-24 | Fujitsu Ltd | Contactor for semiconductor device |
| WO2006095759A1 (en) * | 2005-03-08 | 2006-09-14 | Tokyo Electron Limited | Method of forming connection pin, probe, connection pin, probe card, and method of producing probe card |
| JPWO2006095759A1 (en) * | 2005-03-08 | 2008-08-14 | 東京エレクトロン株式会社 | Method of forming connection pin, probe, connection pin, probe card, and probe card manufacturing method |
| JP4588711B2 (en) * | 2005-03-08 | 2010-12-01 | 東京エレクトロン株式会社 | Method of forming connection pin, probe, connection pin, probe card, and probe card manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH082617Y2 (en) | 1996-01-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |