JPS6378230U - - Google Patents
Info
- Publication number
- JPS6378230U JPS6378230U JP17304986U JP17304986U JPS6378230U JP S6378230 U JPS6378230 U JP S6378230U JP 17304986 U JP17304986 U JP 17304986U JP 17304986 U JP17304986 U JP 17304986U JP S6378230 U JPS6378230 U JP S6378230U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- semiconductor thin
- connector
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
Description
第１図は、本考案センサの一例の概要を示す斜
面図、第２図は、本考案センサの他の一例の概要
を示す斜面図、第３図は、本考案センサの使用例
を示す斜面図、第４図は、本考案センサの真空下
での応答特性を示すグラフである。
１……基板、３……半導体薄膜又は金属薄膜、
５……薄膜電極、７……コネクタ、９……ゲージ
ヘツド。
FIG. 1 is a perspective view showing an overview of an example of the sensor of the present invention, FIG. 2 is a perspective view showing an overview of another example of the sensor of the invention, and FIG. 3 is a slope view showing an example of use of the sensor of the invention. 4 are graphs showing the response characteristics of the sensor of the present invention under vacuum. 1...Substrate, 3...Semiconductor thin film or metal thin film,
5... Thin film electrode, 7... Connector, 9... Gauge head.
Claims (1)
膜又は金属薄膜を備え、該半導体薄膜又は金属薄
膜と測定回路との電気的接続をコネクタを介して
行なうようにしたことを特徴とする熱伝導型真空
計用センサ。 A thermally conductive vacuum comprising a semiconductor thin film or metal thin film on a substrate made of a heat-resistant ultra-thin film, and electrical connection between the semiconductor thin film or metal thin film and a measurement circuit is made via a connector. Metering sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986173049U JPH0338668Y2 (en) | 1986-11-10 | 1986-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986173049U JPH0338668Y2 (en) | 1986-11-10 | 1986-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6378230U true JPS6378230U (en) | 1988-05-24 |
| JPH0338668Y2 JPH0338668Y2 (en) | 1991-08-15 |
Family
ID=31110149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986173049U Expired JPH0338668Y2 (en) | 1986-11-10 | 1986-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338668Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010502949A (en) * | 2006-08-29 | 2010-01-28 | イーストマン コダック カンパニー | Pressure gauge for organic matter |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61240135A (en) * | 1985-04-17 | 1986-10-25 | Yamatake Honeywell Co Ltd | Vacuum gauge |
| JPS61173043U (en) * | 1985-04-17 | 1986-10-28 |
-
1986
- 1986-11-10 JP JP1986173049U patent/JPH0338668Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61240135A (en) * | 1985-04-17 | 1986-10-25 | Yamatake Honeywell Co Ltd | Vacuum gauge |
| JPS61173043U (en) * | 1985-04-17 | 1986-10-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010502949A (en) * | 2006-08-29 | 2010-01-28 | イーストマン コダック カンパニー | Pressure gauge for organic matter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0338668Y2 (en) | 1991-08-15 |
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