JPS6433058U - - Google Patents
Info
- Publication number
- JPS6433058U JPS6433058U JP12775487U JP12775487U JPS6433058U JP S6433058 U JPS6433058 U JP S6433058U JP 12775487 U JP12775487 U JP 12775487U JP 12775487 U JP12775487 U JP 12775487U JP S6433058 U JPS6433058 U JP S6433058U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film resistor
- resistance element
- view
- passivation material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000002161 passivation Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 1
Description
第１図イは本考案の一例を示す感温素子の平面
図、第１図ロはその側面図、第２図は本考案の感
温素子を用いた湿度センサの出力特性を示すグラ
フ、第３図イは従来の感温素子の一例を示す平面
図、第３図ロはその側面図、第４図イは従来の感
温素子の別の例の平面図、第４図ロはその側面図
、第５図は第３図に示す感温素子を用いた従来の
温度センサの特性を示すグラフである。
１０……抵抗素子、１１……絶縁基板、１２…
…薄膜抵抗体、１３……リード、２０……パツシ
ベーシヨン材。
FIG. 1A is a plan view of a temperature-sensitive element showing an example of the present invention, FIG. 1B is a side view thereof, and FIG. Figure 3A is a plan view showing an example of a conventional temperature sensing element, Figure 3B is a side view thereof, Figure 4A is a plan view of another example of a conventional temperature sensing element, and Figure 4B is a side view thereof. 5 are graphs showing the characteristics of a conventional temperature sensor using the temperature sensing element shown in FIG. 10... Resistance element, 11... Insulating substrate, 12...
... Thin film resistor, 13... Lead, 20... Passivation material.
Claims (1)
に被覆するパツシベーシヨン材と、 を具備する感温素子。[Claims for Utility Model Registration] A temperature-sensitive element comprising: a resistance element having a thin film resistor; and a passivation material covering the resistance element so that the thin film resistor is exposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12775487U JPS6433058U (en) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12775487U JPS6433058U (en) | 1987-08-21 | 1987-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433058U true JPS6433058U (en) | 1989-03-01 |
Family
ID=31380465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12775487U Pending JPS6433058U (en) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433058U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101948U (en) * | 1990-02-05 | 1991-10-23 |
-
1987
- 1987-08-21 JP JP12775487U patent/JPS6433058U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101948U (en) * | 1990-02-05 | 1991-10-23 |