JPS6161848U - - Google Patents

Info

Publication number
JPS6161848U
JPS6161848U JP14539984U JP14539984U JPS6161848U JP S6161848 U JPS6161848 U JP S6161848U JP 14539984 U JP14539984 U JP 14539984U JP 14539984 U JP14539984 U JP 14539984U JP S6161848 U JPS6161848 U JP S6161848U
Authority
JP
Japan
Prior art keywords
gauge
diaphragm
pressure sensor
gauge resistors
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14539984U
Other languages
Japanese (ja)
Other versions
JPH0319232Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984145399U priority Critical patent/JPH0319232Y2/ja
Publication of JPS6161848U publication Critical patent/JPS6161848U/ja
Application granted granted Critical
Publication of JPH0319232Y2 publication Critical patent/JPH0319232Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例の構成を示す平面
図、第２図は従来の圧力センサの構成を示す平面
図である。 ２……ダイヤフラム、３ａ〜３ｄ……ゲージ抵
抗、５……ヒートシンク。 FIG. 1 is a plan view showing the structure of an embodiment of this invention, and FIG. 2 is a plan view showing the structure of a conventional pressure sensor. 2...Diaphragm, 3a-3d...Gauge resistance, 5...Heat sink.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ダイヤフラムの中央部に第１、第２のゲージ抵
抗を形成し、前記ダイヤフラムの周縁部に第３、
第４のゲージ抵抗を形成してなる半導体圧力セン
サにおいて、前記第１、第２のゲージ抵抗の周囲
に放熱用のヒートシンクを形成してなる半導体圧
力センサ。 First and second gauge resistors are formed at the center of the diaphragm, and third and second gauge resistors are formed at the periphery of the diaphragm.
A semiconductor pressure sensor comprising a fourth gauge resistor, the semiconductor pressure sensor comprising a heat sink for heat radiation formed around the first and second gauge resistors.
JP1984145399U 1984-09-26 1984-09-26 Expired JPH0319232Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984145399U JPH0319232Y2 (en) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984145399U JPH0319232Y2 (en) 1984-09-26 1984-09-26

Publications (2)

Publication Number Publication Date
JPS6161848U true JPS6161848U (en) 1986-04-25
JPH0319232Y2 JPH0319232Y2 (en) 1991-04-23

Family

ID=30703653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984145399U Expired JPH0319232Y2 (en) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPH0319232Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032389A (en) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd Physical quantity sensor and manufacturing method therefor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4994573U (en) * 1972-12-08 1974-08-15
JPS5468170A (en) * 1977-11-11 1979-06-01 Hitachi Ltd Fine pattern element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4994573U (en) * 1972-12-08 1974-08-15
JPS5468170A (en) * 1977-11-11 1979-06-01 Hitachi Ltd Fine pattern element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032389A (en) * 2008-07-29 2010-02-12 Dainippon Printing Co Ltd Physical quantity sensor and manufacturing method therefor

Also Published As

Publication number Publication date
JPH0319232Y2 (en) 1991-04-23

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