JPS63114049U - - Google Patents
Info
- Publication number
- JPS63114049U JPS63114049U JP610687U JP610687U JPS63114049U JP S63114049 U JPS63114049 U JP S63114049U JP 610687 U JP610687 U JP 610687U JP 610687 U JP610687 U JP 610687U JP S63114049 U JPS63114049 U JP S63114049U
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- electrode film
- semiconductor
- piezoresistors
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案実施例の要部を示し、第１図Ａ
は平面図、第１図Ｂは同Ｂ―Ｂ断面図である
。第２図乃至第３図は従来例を示し、第２図Ａは
断面図、第２図Ｂ、第３図Ａは要部平面図、第３
図Ｂ及び第３図Ｃは、夫々第３図ＡにおけるＢ
―Ｂ及びＣ―Ｃ断面図である。
３……半導体ダイアフラム、４ａ〜４ｄ……ピ
エゾ抵抗、５……配線用電極膜。
Figure 1 shows the main parts of the embodiment of the present invention, and Figure 1A
1 is a plan view, and FIG. 1B is a sectional view taken along the line BB. Figures 2 and 3 show conventional examples, with Figure 2A being a sectional view, Figures 2B and 3A being a plan view of main parts, and Figure 3
Figure B and Figure 3C represent B in Figure 3A, respectively.
-B and CC sectional views. 3... Semiconductor diaphragm, 4a to 4d... Piezoresistor, 5... Wiring electrode film.
Claims (1)
により形成すると共に、前記各抵抗に配線用電極
膜を結合した構成において、前記抵抗と電極膜と
の結合面積を各抵抗について全てほゞ同一にした
ことを特徴とする半導体圧力センサ。 A structure in which a plurality of piezoresistors are formed by diffusion on a semiconductor diaphragm, and a wiring electrode film is coupled to each of the resistors, and the bonding area between the resistor and the electrode film is made substantially the same for each resistor. Semiconductor pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610687U JPS63114049U (en) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610687U JPS63114049U (en) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114049U true JPS63114049U (en) | 1988-07-22 |
Family
ID=30788309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP610687U Pending JPS63114049U (en) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114049U (en) |
-
1987
- 1987-01-20 JP JP610687U patent/JPS63114049U/ja active Pending