JPH0415034U - - Google Patents
Info
- Publication number
- JPH0415034U JPH0415034U JP5376590U JP5376590U JPH0415034U JP H0415034 U JPH0415034 U JP H0415034U JP 5376590 U JP5376590 U JP 5376590U JP 5376590 U JP5376590 U JP 5376590U JP H0415034 U JPH0415034 U JP H0415034U
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- gauge
- pressure sensor
- lead electrode
- external lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図ａ，ｂは本考案による圧力センサの一実
施例を示す構成図、第２図ａ，ｂは本考案による
圧力センサのゲージ抵抗の一実施例を示す構成図
、第３図は本考案による圧力センサのトリミング
抵抗の一実施例を示す構成図、第４図は本考案に
よる圧力センサのフレキシブルサーキツトの一実
施例を示す構成図、第５図は本考案による圧力セ
ンサのトリミング抵抗のトリミング方法の一実施
例を示す説明図、第６図ａ，ｂは従来における圧
力センサの一例を示す構成図、第７図は第６図に
おけるゲージ抵抗の詳細を示す構成図である。
１，５１……ダイアフラム、２，５２……トリ
ミング抵抗、５，５３……フレキシブルサーキツ
ト、５Ａ……延存部、６……金パツド、７……配
線層、８……ボンデングワイヤ、１０……切り欠
き、Ｒ１，Ｒ２，Ｒ３，Ｒ４……ゲージ抵抗、Ｐ
１，Ｐ２，Ｐ３，Ｐ４，Ｐ５，Ｐ６……電極。
Figures 1a and b are block diagrams showing an embodiment of the pressure sensor according to the present invention, Figures 2a and b are block diagrams showing an embodiment of the gauge resistance of the pressure sensor according to the present invention, and Figure 3 is a block diagram showing an embodiment of the pressure sensor according to the present invention. Fig. 4 is a block diagram showing an embodiment of the flexible circuit of the pressure sensor according to the invention; Fig. 5 is a diagram showing the trimming resistance of the pressure sensor according to the invention. FIGS. 6a and 6b are block diagrams showing an example of a conventional pressure sensor, and FIG. 7 is a block diagram showing details of the gauge resistor in FIG. 6. DESCRIPTION OF SYMBOLS 1,51...Diaphragm, 2,52...Trimming resistor, 5,53...Flexible circuit, 5A...Extension part, 6...Gold pad, 7...Wiring layer, 8...Bonding wire, 10... Notch, R1, R2, R3, R4... Gauge resistance, P
1, P2, P3, P4, P5, P6...electrodes.
Claims (1)
Ｒ１〜Ｒ４、外部引出電極６および前記ゲージ抵
抗Ｒ１〜Ｒ４と外部引出電極６との間に介在され
るトリミング抵抗２とを具え、前記ゲージ抵抗Ｒ
１〜Ｒ４、外部引出電極６、およびトリミング抵
抗２とでブリツジ回路を構成している圧力センサ
において、前記トリミング抵抗２は、抵抗調整の
予期される箇所に画一的に予め組み込まれて配線
されているとともに、切り欠き１０によりトリミ
ングできるように構成したことを特徴とする圧力
センサ。 The gauge resistor R includes gauge resistors R1 to R4 formed on the upper surface of the diaphragm 1, an external lead electrode 6, and a trimming resistor 2 interposed between the gauge resistors R1 to R4 and the external lead electrode 6.
1 to R4, an external extraction electrode 6, and a trimming resistor 2 constitute a bridge circuit. A pressure sensor characterized in that it is configured such that it can be trimmed using a notch 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5376590U JPH0415034U (en) | 1990-05-23 | 1990-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5376590U JPH0415034U (en) | 1990-05-23 | 1990-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415034U true JPH0415034U (en) | 1992-02-06 |
Family
ID=31575238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5376590U Pending JPH0415034U (en) | 1990-05-23 | 1990-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415034U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01302867A (en) * | 1988-05-31 | 1989-12-06 | Toshiba Corp | Semiconductor sensor |
-
1990
- 1990-05-23 JP JP5376590U patent/JPH0415034U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01302867A (en) * | 1988-05-31 | 1989-12-06 | Toshiba Corp | Semiconductor sensor |