JPH0453533U - - Google Patents
Info
- Publication number
- JPH0453533U JPH0453533U JP9620190U JP9620190U JPH0453533U JP H0453533 U JPH0453533 U JP H0453533U JP 9620190 U JP9620190 U JP 9620190U JP 9620190 U JP9620190 U JP 9620190U JP H0453533 U JPH0453533 U JP H0453533U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- pair
- voltage detection
- external lead
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案による圧力センサの一実施例
を示す平面図、第２図はフレキシブルサーキツト
を断面として示す一実施例の側面図、第３図は第
１図の部拡大図、第４図は一実施例におけるゲ
ージ抵抗の拡大平面図、第５図は圧力センサの従
来例を示す平面図、第６図は第２図に対応した従
来例の側面図である。
１，１１……圧力センサ、２，１２……ダイア
フラム、２ａ，１２ａ……圧力応動部、３，４，
１５，１６……中継電極、５，１３……フレキシ
ブルサーキツト、５ａ，１３ａ……環状部、５ｂ
，１３ｂ……延出部、Ｐ１，Ｐ２，Ｐ３，Ｐ４，
Ｐ５，Ｐ６，Ｐ１１，Ｐ１２，Ｒ１４，Ｐ１５，
Ｐ１６……電極、Ｒ１，Ｒ２，Ｒ３，Ｒ４，Ｒ１
１，Ｒ１２，Ｒ１３，Ｒ１４……ゲージ抵抗、Ｒ
５，Ｒ６，Ｒ７，Ｒ８，Ｒ１５，Ｒ１６，Ｒ１７
，Ｒ１８……トリミング抵抗、Ｄ１，Ｄ２……給
電用外部引出電極、Ｄ３，Ｄ４……電圧検出用外
部引出電極、Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４…
…外部引出電極、Ｗ１，Ｗ２，Ｗ３，Ｗ４，Ｗ５
，Ｗ６，Ｗ７，Ｗ１１，Ｗ１２，Ｗ１３，Ｗ１４
，Ｗ１７，Ｗ１８，Ｗ１９，Ｗ２０，Ｗ２１……
ワイヤ。
FIG. 1 is a plan view showing an embodiment of the pressure sensor according to this invention, FIG. 2 is a side view of the embodiment showing a flexible circuit in cross section, FIG. 3 is an enlarged view of a portion of FIG. 1, and FIG. The figure is an enlarged plan view of a gauge resistor in one embodiment, FIG. 5 is a plan view showing a conventional example of a pressure sensor, and FIG. 6 is a side view of the conventional example corresponding to FIG. 1, 11...Pressure sensor, 2, 12...Diaphragm, 2a, 12a...Pressure responsive part, 3, 4,
15, 16... Relay electrode, 5, 13... Flexible circuit, 5a, 13a... Annular part, 5b
, 13b...Extending portion, P 1 , P 2 , P 3 , P 4 ,
P 5 , P 6 , P 11 , P 12 , R 14 , P 15 ,
P 16 ... electrode, R 1 , R 2 , R 3 , R 4 , R 1
1 , R 12 , R 13 , R 14 ... Gauge resistance, R
5 , R 6 , R 7 , R 8 , R 15 , R 16 , R 17
, R 18 ... Trimming resistor, D 1 , D 2 ... External lead electrode for power supply, D 3 , D 4 ... External lead electrode for voltage detection, D 11 , D 12 , D 13 , D 14 ...
...External extraction electrodes, W 1 , W 2 , W 3 , W 4 , W 5
, W 6 , W 7 , W 11 , W 12 , W 13 , W 14
, W 17 , W 18 , W 19 , W 20 , W 21 ...
wire.
Claims (1)
ゲージ抵抗Ｒ１，Ｒ２，Ｒ３，Ｒ４と各電極Ｐ１
，Ｐ２，Ｐ３，Ｐ４，Ｐ５，Ｐ６とが２組に分離
して形成され、かつ、前記各ゲージ抵抗Ｒ１，Ｒ
２，Ｒ３，Ｒ４に対応した円弧状のトリミング抵
抗Ｒ５，Ｒ６，Ｒ７，Ｒ８が円周上に配置して形
成されるとともに、前記各電極の近傍に臨んでこ
れらを取囲むフレキシブルサーキツト５上に一対
の給電用外部引出電極Ｄ１，Ｄ２および一対の電
圧検出用外部引出電極Ｄ３，Ｄ４が配設される圧
力センサ１において、上記一対の給電用外部引出
電極Ｄ１，Ｄ２を、それぞれ対応する各１個の電
極Ｐ１，Ｐ４の近傍に配置し、また前記一対の電
圧検出用外部引出電極Ｄ３，Ｄ４を、それぞれ対
応する２組に分離配置された各２組の電極Ｐ３，
Ｐ５，Ｐ２，Ｐ６の近傍に臨むよう円弧状に形成
し、各給電用外部引出電極Ｄ１，Ｄ２および電圧
検出用外部引出電極Ｄ３，Ｄ４をそれぞれ対応す
る電極Ｐ１，Ｐ４，Ｐ３，Ｐ５，Ｐ２，Ｐ６に接
続してブリツジ回路を形成する各ワイヤＷ１，Ｗ
２，Ｗ３，Ｗ４，Ｗ５，Ｗ６，Ｗ７の長さを短縮
化したことを特徴とする圧力センサ。 Each gauge resistor R 1 , R 2 , R 3 , R 4 forming a bridge circuit on the diaphragm 2 and each electrode P 1
, P 2 , P 3 , P 4 , P 5 , P 6 are formed separately into two sets, and each of the gauge resistors R 1 , R
Arc-shaped trimming resistors R 5 , R 6 , R 7 , and R 8 corresponding to R 2 , R 3 , and R 4 are arranged and formed on the circumference, and are arranged in the vicinity of each of the electrodes to remove them. In the pressure sensor 1 in which a pair of power supply external lead electrodes D 1 , D 2 and a pair of voltage detection external lead electrodes D 3 , D 4 are disposed on a surrounding flexible circuit 5, the pair of power supply external lead electrodes D 1 , D 2 and a pair of voltage detection external lead electrodes D 3 , D 4 are arranged. The electrodes D 1 and D 2 are arranged near the corresponding electrodes P 1 and P 4 , respectively, and the pair of voltage detection external extraction electrodes D 3 and D 4 are arranged in two corresponding sets. Two sets of electrodes P 3 arranged separately,
P 5 , P 2 , P 6 are formed in an arc shape so as to face the vicinity of the electrodes P 1 , P 6 , and the external extraction electrodes D 1 , D 2 for power supply and the external extraction electrodes D 3 , D 4 for voltage detection are connected to the corresponding electrodes P 1 , Each wire W 1 , W connected to P 4 , P 3 , P 5 , P 2 , P 6 to form a bridge circuit
A pressure sensor characterized in that the lengths of 2 , W 3 , W 4 , W 5 , W 6 , and W 7 are shortened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620190U JPH0453533U (en) | 1990-09-13 | 1990-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620190U JPH0453533U (en) | 1990-09-13 | 1990-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453533U true JPH0453533U (en) | 1992-05-07 |
Family
ID=31835539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9620190U Pending JPH0453533U (en) | 1990-09-13 | 1990-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453533U (en) |
-
1990
- 1990-09-13 JP JP9620190U patent/JPH0453533U/ja active Pending