JPH0243658U - - Google Patents
Info
- Publication number
- JPH0243658U JPH0243658U JP12234688U JP12234688U JPH0243658U JP H0243658 U JPH0243658 U JP H0243658U JP 12234688 U JP12234688 U JP 12234688U JP 12234688 U JP12234688 U JP 12234688U JP H0243658 U JPH0243658 U JP H0243658U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- conductor pattern
- fixed end
- lead frame
- weights
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Description
第1図は、この考案の好適な実施例を示すセン
サ装置の斜視図である。第2図は、第1図に示す
ものの側面図である。第3図は、この考案のセン
サ装置の重錘部の拡大断面図である。第4図は従
来の技術に於けるセンサ装置の平面図である。
1……セラミツク基板、2……導体パターン、
3……リードフレーム、4……重錘、5……ピエ
ゾ抵抗体層、6……固定部。
FIG. 1 is a perspective view of a sensor device showing a preferred embodiment of this invention. FIG. 2 is a side view of what is shown in FIG. FIG. 3 is an enlarged sectional view of the weight portion of the sensor device of this invention. FIG. 4 is a plan view of a conventional sensor device. 1...Ceramic substrate, 2...Conductor pattern,
3... Lead frame, 4... Weight, 5... Piezoresistor layer, 6... Fixed part.
Claims (1)
形成した導体パターンと、前記セラミツク基板の
固定端部に延長した導体パターンに接続するリー
ドフレームと、前記セラミツク基板の自由端部に
設けた重錘と、前記セラミツク基板の固定端部に
形成した前記導体パターンの対向する電極間に橋
絡形成するピエゾ抵抗体層とで成る構成に於いて
、前記セラミツク基板の固定端部又は自由端部に
設置した前記重錘の少なくともいずれか一方を樹
脂封止したことを特徴とする厚膜式Gセンサ。 a ceramic substrate, a conductor pattern printed on the ceramic substrate, a lead frame connected to the conductor pattern extending to a fixed end of the ceramic substrate, a weight provided at a free end of the ceramic substrate, and a piezoresistor layer forming a bridge between opposing electrodes of the conductive pattern formed on the fixed end of the ceramic substrate, A thick film type G sensor characterized in that at least one of the weights is sealed with resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12234688U JPH0243658U (en) | 1988-09-19 | 1988-09-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12234688U JPH0243658U (en) | 1988-09-19 | 1988-09-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0243658U true JPH0243658U (en) | 1990-03-26 |
Family
ID=31370190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12234688U Pending JPH0243658U (en) | 1988-09-19 | 1988-09-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0243658U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04313061A (en) * | 1991-03-25 | 1992-11-05 | Mitsubishi Electric Corp | Semiconductor acceleration sensor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144990A (en) * | 1978-05-04 | 1979-11-12 | Hitachi Ltd | Impact detector |
-
1988
- 1988-09-19 JP JP12234688U patent/JPH0243658U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144990A (en) * | 1978-05-04 | 1979-11-12 | Hitachi Ltd | Impact detector |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04313061A (en) * | 1991-03-25 | 1992-11-05 | Mitsubishi Electric Corp | Semiconductor acceleration sensor |