JPH0243658U - - Google Patents

Info

Publication number
JPH0243658U
JPH0243658U JP12234688U JP12234688U JPH0243658U JP H0243658 U JPH0243658 U JP H0243658U JP 12234688 U JP12234688 U JP 12234688U JP 12234688 U JP12234688 U JP 12234688U JP H0243658 U JPH0243658 U JP H0243658U
Authority
JP
Japan
Prior art keywords
ceramic substrate
conductor pattern
fixed end
lead frame
weights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12234688U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12234688U priority Critical patent/JPH0243658U/ja
Publication of JPH0243658U publication Critical patent/JPH0243658U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この考案の好適な実施例を示すセン
サ装置の斜視図である。第2図は、第1図に示す
ものの側面図である。第3図は、この考案のセン
サ装置の重錘部の拡大断面図である。第4図は従
来の技術に於けるセンサ装置の平面図である。 1……セラミツク基板、2……導体パターン、
3……リードフレーム、4……重錘、5……ピエ
ゾ抵抗体層、6……固定部。
FIG. 1 is a perspective view of a sensor device showing a preferred embodiment of this invention. FIG. 2 is a side view of what is shown in FIG. FIG. 3 is an enlarged sectional view of the weight portion of the sensor device of this invention. FIG. 4 is a plan view of a conventional sensor device. 1...Ceramic substrate, 2...Conductor pattern,
3... Lead frame, 4... Weight, 5... Piezoresistor layer, 6... Fixed part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] セラミツク基板と、該セラミツク基板上に印刷
形成した導体パターンと、前記セラミツク基板の
固定端部に延長した導体パターンに接続するリー
ドフレームと、前記セラミツク基板の自由端部に
設けた重錘と、前記セラミツク基板の固定端部に
形成した前記導体パターンの対向する電極間に橋
絡形成するピエゾ抵抗体層とで成る構成に於いて
、前記セラミツク基板の固定端部又は自由端部に
設置した前記重錘の少なくともいずれか一方を樹
脂封止したことを特徴とする厚膜式Gセンサ。
a ceramic substrate, a conductor pattern printed on the ceramic substrate, a lead frame connected to the conductor pattern extending to a fixed end of the ceramic substrate, a weight provided at a free end of the ceramic substrate, and a piezoresistor layer forming a bridge between opposing electrodes of the conductive pattern formed on the fixed end of the ceramic substrate, A thick film type G sensor characterized in that at least one of the weights is sealed with resin.
JP12234688U 1988-09-19 1988-09-19 Pending JPH0243658U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12234688U JPH0243658U (en) 1988-09-19 1988-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12234688U JPH0243658U (en) 1988-09-19 1988-09-19

Publications (1)

Publication Number Publication Date
JPH0243658U true JPH0243658U (en) 1990-03-26

Family

ID=31370190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12234688U Pending JPH0243658U (en) 1988-09-19 1988-09-19

Country Status (1)

Country Link
JP (1) JPH0243658U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04313061A (en) * 1991-03-25 1992-11-05 Mitsubishi Electric Corp Semiconductor acceleration sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144990A (en) * 1978-05-04 1979-11-12 Hitachi Ltd Impact detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144990A (en) * 1978-05-04 1979-11-12 Hitachi Ltd Impact detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04313061A (en) * 1991-03-25 1992-11-05 Mitsubishi Electric Corp Semiconductor acceleration sensor

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