JPS6432U - - Google Patents
Info
- Publication number
- JPS6432U JPS6432U JP9417187U JP9417187U JPS6432U JP S6432 U JPS6432 U JP S6432U JP 9417187 U JP9417187 U JP 9417187U JP 9417187 U JP9417187 U JP 9417187U JP S6432 U JPS6432 U JP S6432U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure sensor
- pedestal
- sensor according
- intermediate ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例に係る圧力センサを
示す分解斜視図、第２図は第１図に示した圧力セ
ンサの断面図、第３図は第１図中に示したダイア
フラムの下面図、第４図は第３図に示したダイア
フラムの下面に形成されたフルブリツジ回路の回
路図、第５図は本考案の他の実施例に係る圧力セ
ンサを示す断面図、第６図は本考案のその他の実
施例に係る圧力センサを示す断面図、第７図は従
来の圧力センサの一例を示す断面図、第８図は従
来の圧力センサの他の例を示す断面図である。
図において、１，１１……ダイアフラム、１ａ
……延出部、１ｂ……受圧部、２Ａ，２Ｂ，２，
１２……台座、２ａ，２ｂ，２ｃ，１２ａ……通
気孔、３Ａ，３Ｂ，１３……中間リング、４ａ〜
４ｄ……感圧抵抗、５……リード線、６ａ〜６ｄ
……電極端子、７……接着材層、１１ａ，１３ａ
……無機質絶縁層である。
FIG. 1 is an exploded perspective view of a pressure sensor according to an embodiment of the present invention, FIG. 2 is a sectional view of the pressure sensor shown in FIG. 1, and FIG. 3 is the bottom surface of the diaphragm shown in FIG. 1. 4 is a circuit diagram of a full bridge circuit formed on the lower surface of the diaphragm shown in FIG. 3, FIG. 5 is a sectional view showing a pressure sensor according to another embodiment of the present invention, and FIG. FIG. 7 is a sectional view showing an example of a conventional pressure sensor, and FIG. 8 is a sectional view showing another example of a conventional pressure sensor. In the figure, 1, 11... diaphragm, 1a
...Extending part, 1b...Pressure receiving part, 2A, 2B, 2,
12...Pedestal, 2a, 2b, 2c, 12a...Vent hole, 3A, 3B, 13...Middle ring, 4a~
4d...Pressure sensitive resistor, 5...Lead wire, 6a to 6d
... Electrode terminal, 7 ... Adhesive layer, 11a, 13a
...It is an inorganic insulating layer.
Claims (1)
ド線等が形成されたダイアフラムと、 このダイアフラムを支持する台座と、 前記ダイアフラムと前記台座との間に介挿され
た薄板状の中間リングと、 前記ダイアフラムと前記中間リングとを接着す
る接着材層と、 を有することを特徴とする圧力センサ。 (2) 前記ダイアフラムが、セラミツク薄板で形
成されていることを特徴とする実用新案登録請求
の範囲第１項記載の圧力センサ。 (3) 前記ダイアフラムが、無機質絶縁層で表面
を被覆された金属薄板で形成されていることを特
徴とする実用新案登録請求の範囲第１項記載の圧
力センサ。[Claims for Utility Model Registration] (1) A diaphragm on which pressure-sensitive resistors, lead wires, etc. are formed using thick film printing and baking technology, a pedestal that supports this diaphragm, and an intervening device between the diaphragm and the pedestal. A pressure sensor comprising: a thin plate-like intermediate ring inserted therein; and an adhesive layer bonding the diaphragm and the intermediate ring. (2) The pressure sensor according to claim 1, wherein the diaphragm is formed of a ceramic thin plate. (3) The pressure sensor according to claim 1, wherein the diaphragm is formed of a thin metal plate whose surface is coated with an inorganic insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417187U JPS6432U (en) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417187U JPS6432U (en) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6432U true JPS6432U (en) | 1989-01-05 |
Family
ID=30957373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9417187U Pending JPS6432U (en) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6432U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5476278A (en) * | 1977-11-11 | 1979-06-18 | Motorola Inc | Method of making capacitive pressure transducer by piling up uniform glass insulator rings |
| JPS5854676A (en) * | 1981-09-28 | 1983-03-31 | Hitachi Ltd | Semiconductor pressure converter |
| JPS60227142A (en) * | 1984-04-24 | 1985-11-12 | Tdk Corp | Pressure sensor |
-
1987
- 1987-06-19 JP JP9417187U patent/JPS6432U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5476278A (en) * | 1977-11-11 | 1979-06-18 | Motorola Inc | Method of making capacitive pressure transducer by piling up uniform glass insulator rings |
| JPS5854676A (en) * | 1981-09-28 | 1983-03-31 | Hitachi Ltd | Semiconductor pressure converter |
| JPS60227142A (en) * | 1984-04-24 | 1985-11-12 | Tdk Corp | Pressure sensor |
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