JPS637336U - - Google Patents
Info
- Publication number
- JPS637336U JPS637336U JP10057286U JP10057286U JPS637336U JP S637336 U JPS637336 U JP S637336U JP 10057286 U JP10057286 U JP 10057286U JP 10057286 U JP10057286 U JP 10057286U JP S637336 U JPS637336 U JP S637336U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- platinum thin
- film resistor
- tcr
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の白金薄膜温度センサに係る実
施例を示す概略図、第２図は本考案の白金薄膜温
度センサに係る他の実施例を示す断面図、第３図
はＴＣＲ調整器の回路例を示す回路構成図である
。
１……白金薄膜抵抗体、２……基板、３……Ｔ
ＣＲ調整器。
Fig. 1 is a schematic diagram showing an embodiment of the platinum thin film temperature sensor of the present invention, Fig. 2 is a sectional view showing another embodiment of the platinum thin film temperature sensor of the present invention, and Fig. 3 is a diagram of a TCR regulator. FIG. 2 is a circuit configuration diagram showing a circuit example. 1...Platinum thin film resistor, 2...Substrate, 3...T
CR adjuster.
Claims (1)
、且つそのＴＣＲ値の調整を行なうＴＣＲ調整器
とから成る白金薄膜温度センサ。 A platinum thin film temperature sensor comprising a platinum thin film resistor and a TCR regulator connected to the thin film resistor and adjusting its TCR value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10057286U JPS637336U (en) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10057286U JPS637336U (en) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS637336U true JPS637336U (en) | 1988-01-19 |
Family
ID=30970522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10057286U Pending JPS637336U (en) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS637336U (en) |
-
1986
- 1986-06-30 JP JP10057286U patent/JPS637336U/ja active Pending