JPH01126538U - - Google Patents
Info
- Publication number
- JPH01126538U JPH01126538U JP2246888U JP2246888U JPH01126538U JP H01126538 U JPH01126538 U JP H01126538U JP 2246888 U JP2246888 U JP 2246888U JP 2246888 U JP2246888 U JP 2246888U JP H01126538 U JPH01126538 U JP H01126538U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- measuring element
- conductive material
- sides
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Thermally Actuated Switches (AREA)
- Thermistors And Varistors (AREA)
Description
図面第１図〜第４図は本考案に係る薄膜温度セ
ンサの実施例を示し、第１図は第１の実施例の平
面図、第２図はその断面図、第３図は第２の実施
例の平面図、第４図はその断面図であり、第５図
は従来の表面温度センサの断面図、第６図は従来
の薄膜温度センサの断面図、第７図は従来の他の
薄膜温度センサの平面図、第８図はその断面図で
ある。
符号２１は基板、２２は孔、２３はサーミスタ
素子、２４ａ，２４ｂは対向電極、２５ａ，２５
ｂはリード線接続用電極、２６は保護膜、２７は
測温素子である。
Drawings 1 to 4 show an embodiment of the thin film temperature sensor according to the present invention, FIG. 1 is a plan view of the first embodiment, FIG. 2 is a sectional view thereof, and FIG. 3 is a diagram of the second embodiment. A plan view of the embodiment, FIG. 4 is a sectional view thereof, FIG. 5 is a sectional view of a conventional surface temperature sensor, FIG. 6 is a sectional view of a conventional thin film temperature sensor, and FIG. 7 is a sectional view of another conventional surface temperature sensor. A plan view of the thin film temperature sensor, and FIG. 8 is a sectional view thereof. 21 is a substrate, 22 is a hole, 23 is a thermistor element, 24a, 24b are counter electrodes, 25a, 25
b is a lead wire connection electrode, 26 is a protective film, and 27 is a temperature measuring element.
Claims (1)
より測温素子を形成し、該測温素子の両側に薄膜
状の導電性材を接続し、該導電性材を前記透孔を
介して前記基板の裏面側に薄膜状に形成したこと
を特徴とする薄膜温度センサ。 A temperature measuring element is formed by a thin film on the surface of an insulating substrate having through holes on both sides, a thin film-like conductive material is connected to both sides of the temperature measuring element, and the conductive material is connected to the above through the through hole. A thin film temperature sensor characterized by forming a thin film on the back side of a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2246888U JPH01126538U (en) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2246888U JPH01126538U (en) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01126538U true JPH01126538U (en) | 1989-08-29 |
Family
ID=31240619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2246888U Pending JPH01126538U (en) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01126538U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5799702A (en) * | 1980-12-12 | 1982-06-21 | Matsushita Electric Ind Co Ltd | Thin film thermistor |
| JPS5810875A (en) * | 1981-07-14 | 1983-01-21 | Toshiba Chem Corp | Manufacture of sheet shaped thermocouple |
| JPS62277785A (en) * | 1986-05-26 | 1987-12-02 | 日本電気株式会社 | Printed wiring board |
| JPS6465426A (en) * | 1987-09-04 | 1989-03-10 | Murata Manufacturing Co | Platinum temperature sensor |
-
1988
- 1988-02-23 JP JP2246888U patent/JPH01126538U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5799702A (en) * | 1980-12-12 | 1982-06-21 | Matsushita Electric Ind Co Ltd | Thin film thermistor |
| JPS5810875A (en) * | 1981-07-14 | 1983-01-21 | Toshiba Chem Corp | Manufacture of sheet shaped thermocouple |
| JPS62277785A (en) * | 1986-05-26 | 1987-12-02 | 日本電気株式会社 | Printed wiring board |
| JPS6465426A (en) * | 1987-09-04 | 1989-03-10 | Murata Manufacturing Co | Platinum temperature sensor |
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