JPH0481022U - - Google Patents
Info
- Publication number
- JPH0481022U JPH0481022U JP12568490U JP12568490U JPH0481022U JP H0481022 U JPH0481022 U JP H0481022U JP 12568490 U JP12568490 U JP 12568490U JP 12568490 U JP12568490 U JP 12568490U JP H0481022 U JPH0481022 U JP H0481022U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- linear metal
- platinum
- aluminum nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910000531 Co alloy Inorganic materials 0.000 claims 1
- CLBRCZAHAHECKY-UHFFFAOYSA-N [Co].[Pt] Chemical compound [Co].[Pt] CLBRCZAHAHECKY-UHFFFAOYSA-N 0.000 claims 1
- 230000002500 effect on skin Effects 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Description
第１図は本考案の薄膜測温抵抗体の構成を示す
図で、第１図ａは平面図、第１図ｂは側面図。第
２図は本考案の多層薄膜測温抵抗体の構成を示す
断面図。第３図は本考案の薄膜測温抵抗体の使用
状態を示す断面図である。
１……窒化アルミニウム基板、２……金属薄膜
、３……電極パツド、４……厚さ、５……チタン
金属薄膜層、６……絶縁層、７……リード線、８
……封止材。
FIG. 1 is a diagram showing the structure of a thin film resistance temperature sensor of the present invention, where FIG. 1a is a plan view and FIG. 1b is a side view. FIG. 2 is a sectional view showing the structure of the multilayer thin film resistance temperature sensor of the present invention. FIG. 3 is a sectional view showing the state in which the thin film resistance temperature detector of the present invention is used. DESCRIPTION OF SYMBOLS 1... Aluminum nitride substrate, 2... Metal thin film, 3... Electrode pad, 4... Thickness, 5... Titanium metal thin film layer, 6... Insulating layer, 7... Lead wire, 8
... Sealing material.
Claims (1)
化に対する電気抵抗の温度係数の大きな金属を線
状の金属薄膜に形成し構成したことを特徴とする
薄膜測温抵抗体。 ２ 線状の金属薄膜に白金またはニツケル、また
は白金−コバルト合金を用いたことを特徴とする
請求項１記載の薄膜測温抵抗体。 ３ 線状の金属薄膜の厚さを特定周波数に対する
表皮効果厚さ以下としたとこを特徴とする請求項
１または請求項２記載の薄膜測温抵抗体。 ４ 窒化アルミニウム基板と線状の金属薄膜との
間に、チタン金属薄膜層またはチタン金属薄膜層
と絶縁層とを介在させたことを特徴とする請求項
１または請求項２記載の薄膜測温抵抗体。[Claims for Utility Model Registration] 1. A thin film resistance temperature detector characterized in that a metal having a large temperature coefficient of electrical resistance against temperature changes is formed into a linear metal thin film on a substrate made of aluminum nitride. 2. The thin film resistance thermometer according to claim 1, wherein the linear metal thin film is made of platinum, nickel, or a platinum-cobalt alloy. 3. The thin film resistance thermometer according to claim 1 or 2, wherein the thickness of the linear metal thin film is equal to or less than the skin effect thickness for a specific frequency. 4. The thin film temperature measuring resistor according to claim 1 or 2, characterized in that a titanium metal thin film layer or a titanium metal thin film layer and an insulating layer are interposed between the aluminum nitride substrate and the linear metal thin film. body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12568490U JPH0481022U (en) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12568490U JPH0481022U (en) | 1990-11-27 | 1990-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0481022U true JPH0481022U (en) | 1992-07-15 |
Family
ID=31873274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12568490U Pending JPH0481022U (en) | 1990-11-27 | 1990-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0481022U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006527378A (en) * | 2003-06-13 | 2006-11-30 | セラマスピード・リミテッド | Temperature detector for electric heating equipment |
| JP2018004314A (en) * | 2016-06-28 | 2018-01-11 | 日立金属株式会社 | Current sensor |
| JP2018151406A (en) * | 2018-06-01 | 2018-09-27 | 日立金属株式会社 | Current detection structure |
-
1990
- 1990-11-27 JP JP12568490U patent/JPH0481022U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006527378A (en) * | 2003-06-13 | 2006-11-30 | セラマスピード・リミテッド | Temperature detector for electric heating equipment |
| JP2018004314A (en) * | 2016-06-28 | 2018-01-11 | 日立金属株式会社 | Current sensor |
| JP2018151406A (en) * | 2018-06-01 | 2018-09-27 | 日立金属株式会社 | Current detection structure |