JPS64351U - - Google Patents
Info
- Publication number
- JPS64351U JPS64351U JP9413887U JP9413887U JPS64351U JP S64351 U JPS64351 U JP S64351U JP 9413887 U JP9413887 U JP 9413887U JP 9413887 U JP9413887 U JP 9413887U JP S64351 U JPS64351 U JP S64351U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- piezoelectric bimorph
- bimorph element
- zirconia plate
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical class O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は中間層の例を示す平面図である。
３……ジルコニア製中間層、６……金属薄膜、
７……貫通孔。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a plan view showing an example of the intermediate layer. 3...zirconia intermediate layer, 6...metal thin film,
7...Through hole.
Claims (1)
属薄膜で被覆して導体化した安定化ジルコニア板
を用い、このジルコニア板に複数の貫通孔を設け
、端面以外を導体化し、かつ貫通孔の内側面に導
体の中間層の端面を露出させないように被覆した
ことを特徴とする圧電バイモルフ素子。 A stabilized zirconia plate whose surface is coated with a metal thin film to make it conductive is used as the intermediate electrode layer of the piezoelectric bimorph element, and a plurality of through holes are provided in this zirconia plate, and the inner surface of the through hole is made conductive except for the end surface. A piezoelectric bimorph element characterized in that the end face of the intermediate layer of the conductor is coated so as not to be exposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9413887U JPS64351U (en) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9413887U JPS64351U (en) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS64351U true JPS64351U (en) | 1989-01-05 |
Family
ID=30957307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9413887U Pending JPS64351U (en) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64351U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0422347U (en) * | 1990-06-15 | 1992-02-25 | ||
| WO1999013518A1 (en) * | 1997-09-08 | 1999-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostriction device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56148724A (en) * | 1980-03-19 | 1981-11-18 | Siemens Ag | Actuator for video recorder |
| JPS60245286A (en) * | 1984-05-21 | 1985-12-05 | Murata Mfg Co Ltd | Piezoelectric dispacement element |
| JPS6172682A (en) * | 1984-09-13 | 1986-04-14 | 日立金属株式会社 | Zirconia substrate for magnetic head |
| JPS61173959A (en) * | 1985-01-29 | 1986-08-05 | Nec Corp | Printed circuit board |
-
1987
- 1987-06-19 JP JP9413887U patent/JPS64351U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56148724A (en) * | 1980-03-19 | 1981-11-18 | Siemens Ag | Actuator for video recorder |
| JPS60245286A (en) * | 1984-05-21 | 1985-12-05 | Murata Mfg Co Ltd | Piezoelectric dispacement element |
| JPS6172682A (en) * | 1984-09-13 | 1986-04-14 | 日立金属株式会社 | Zirconia substrate for magnetic head |
| JPS61173959A (en) * | 1985-01-29 | 1986-08-05 | Nec Corp | Printed circuit board |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0422347U (en) * | 1990-06-15 | 1992-02-25 | ||
| WO1999013518A1 (en) * | 1997-09-08 | 1999-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostriction device |