JPH0193992U - - Google Patents
Info
- Publication number
- JPH0193992U JPH0193992U JP18791987U JP18791987U JPH0193992U JP H0193992 U JPH0193992 U JP H0193992U JP 18791987 U JP18791987 U JP 18791987U JP 18791987 U JP18791987 U JP 18791987U JP H0193992 U JPH0193992 U JP H0193992U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- light
- dielectric layer
- width
- adsorption plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
Description
第１図は、本考案の実施例による光透過性静電
吸着板の斜視図、第２図は、第１図の線Ａ−Ａに
沿う断面図である。
１……光透過性静電吸着板、２，３……電極、
４……絶縁支持層、５……絶縁保護層。
FIG. 1 is a perspective view of a light-transmissive electrostatic adsorption plate according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A--A in FIG. 1. 1... Light-transparent electrostatic adsorption plate, 2, 3... Electrode,
4... Insulating support layer, 5... Insulating protective layer.
Claims (1)
に誘電体層を設けてなる静電吸着板において、前
記電極を幅５０μ以下の細線で形成したことを特
徴とする光透過性静電吸着板。 A light-transmissive electrostatic adsorption plate comprising a plurality of electrodes arranged on an insulating substrate and a dielectric layer provided thereon, characterized in that the electrodes are formed of thin wires with a width of 50 μm or less. Adsorption board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18791987U JPH0619346Y2 (en) | 1987-12-10 | 1987-12-10 | Light-transmissive electrostatic attraction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18791987U JPH0619346Y2 (en) | 1987-12-10 | 1987-12-10 | Light-transmissive electrostatic attraction plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0193992U true JPH0193992U (en) | 1989-06-21 |
| JPH0619346Y2 JPH0619346Y2 (en) | 1994-05-18 |
Family
ID=31479048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18791987U Expired - Lifetime JPH0619346Y2 (en) | 1987-12-10 | 1987-12-10 | Light-transmissive electrostatic attraction plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619346Y2 (en) |
-
1987
- 1987-12-10 JP JP18791987U patent/JPH0619346Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619346Y2 (en) | 1994-05-18 |