JPH0459146U - - Google Patents
Info
- Publication number
- JPH0459146U JPH0459146U JP10104690U JP10104690U JPH0459146U JP H0459146 U JPH0459146 U JP H0459146U JP 10104690 U JP10104690 U JP 10104690U JP 10104690 U JP10104690 U JP 10104690U JP H0459146 U JPH0459146 U JP H0459146U
- Authority
- JP
- Japan
- Prior art keywords
- contact point
- plate
- contact
- measured
- separates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案によるプローブヘツドの一実施
例を示す側面図、第２図は同プローブヘツドの平
面図、第３図ａ，ｂ，ｃは同プローブヘツドにお
ける第１の接点と第２の接点の位置関係を示す図
、第４図ａ，ｂは従来のプローブヘツドの一構成
例を示す図である。
１ａ……第１の板状導体、１ｂ……第２の板状
導体、３……第１の接点、４……第２の接点、Ｗ
……被測定物（半導体ウエーハ）。
Fig. 1 is a side view showing an embodiment of the probe head according to the present invention, Fig. 2 is a plan view of the probe head, and Figs. Figures 4a and 4b, which show the positional relationship of the contacts, are diagrams showing an example of the configuration of a conventional probe head. 1a...First plate-shaped conductor, 1b...Second plate-shaped conductor, 3...First contact, 4...Second contact, W
...Object to be measured (semiconductor wafer).
Claims (1)
２枚の板状導体１ａ，１ｂを有し、前記被測定物
と接離する第１の接点３と、該第１の接点の接離
に伴つて前記板状導体の何れかと接離する第２の
接点４とが前記板状導体の先端部分で互いに近接
した位置に設けられていることを特徴とするプロ
ーブヘツドの先端構造。 It has two plate-shaped conductors 1a and 1b arranged in tandem in the vertical direction of the object to be measured W, and has a first contact point 3 that comes into contact with and separates from the object to be measured, and a contact point of the first contact point. A tip structure of a probe head characterized in that a second contact point 4 that comes into contact with or separates from one of the plate-shaped conductors is provided at a position close to each other at the tip of the plate-shaped conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101046U JP2531043Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head tip structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101046U JP2531043Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head tip structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459146U true JPH0459146U (en) | 1992-05-21 |
| JP2531043Y2 JP2531043Y2 (en) | 1997-04-02 |
Family
ID=31844173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990101046U Expired - Lifetime JP2531043Y2 (en) | 1990-09-28 | 1990-09-28 | Probe head tip structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531043Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06300781A (en) * | 1993-04-13 | 1994-10-28 | Nippon Maikuronikusu:Kk | Prober for display panel |
| JP2002082128A (en) * | 2000-09-08 | 2002-03-22 | Mitsubishi Materials Corp | Probe device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (en) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (en) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Probe card |
| JPH01124576U (en) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (en) * | 1988-06-13 | 1990-01-05 |
-
1990
- 1990-09-28 JP JP1990101046U patent/JP2531043Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (en) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (en) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Probe card |
| JPH01124576U (en) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (en) * | 1988-06-13 | 1990-01-05 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06300781A (en) * | 1993-04-13 | 1994-10-28 | Nippon Maikuronikusu:Kk | Prober for display panel |
| JP2002082128A (en) * | 2000-09-08 | 2002-03-22 | Mitsubishi Materials Corp | Probe device |
| JP4504541B2 (en) * | 2000-09-08 | 2010-07-14 | 株式会社ヨコオ | Probe device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531043Y2 (en) | 1997-04-02 |