JPH0480042U - - Google Patents
Info
- Publication number
- JPH0480042U JPH0480042U JP12538890U JP12538890U JPH0480042U JP H0480042 U JPH0480042 U JP H0480042U JP 12538890 U JP12538890 U JP 12538890U JP 12538890 U JP12538890 U JP 12538890U JP H0480042 U JPH0480042 U JP H0480042U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- drying
- semiconductor wafer
- groove
- blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図はこの考案の第１実施例のブロツク図で
ある。第２図はこの考案の第２実施例の概略図で
ある。
１２……ウエーハ直上のノズル、１３，１４…
…キヤリア溝と平行なノズル、１５……ウエーハ
、１６……キヤリア、１６ａ……キヤリアの溝、
１７……ステージ。
FIG. 1 is a block diagram of a first embodiment of this invention. FIG. 2 is a schematic diagram of a second embodiment of this invention. 12... Nozzle directly above the wafer, 13, 14...
...Nozzle parallel to the carrier groove, 15...Wafer, 16...Carrier, 16a...Carrier groove,
17...Stage.
Claims (1)
スや乾燥空気のブローにより乾燥する装置におい
て、 キヤリアの溝部に平行にブローするノズルを設
けたことを特徴とする半導体ウエーハの乾燥装置
。 ２ 溝と垂直方向のキヤリア片端が上下する構造
を持つことを特徴とする半導体ウエーハの乾燥装
置。[Scope of Claim for Utility Model Registration] 1. A device for drying a semiconductor wafer placed on a carrier by blowing inert gas or dry air, characterized in that a nozzle for blowing parallel to the groove of the carrier is provided. drying equipment. 2. A semiconductor wafer drying device characterized by having a structure in which one end of the carrier in a direction perpendicular to the groove moves up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538890U JPH0480042U (en) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538890U JPH0480042U (en) | 1990-11-27 | 1990-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0480042U true JPH0480042U (en) | 1992-07-13 |
Family
ID=31872988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12538890U Pending JPH0480042U (en) | 1990-11-27 | 1990-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0480042U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142343A (en) * | 2010-12-28 | 2012-07-26 | Fujitsu Semiconductor Ltd | Cleaning method and cleaning device |
-
1990
- 1990-11-27 JP JP12538890U patent/JPH0480042U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142343A (en) * | 2010-12-28 | 2012-07-26 | Fujitsu Semiconductor Ltd | Cleaning method and cleaning device |