JPH0455139U - - Google Patents
Info
- Publication number
- JPH0455139U JPH0455139U JP9762590U JP9762590U JPH0455139U JP H0455139 U JPH0455139 U JP H0455139U JP 9762590 U JP9762590 U JP 9762590U JP 9762590 U JP9762590 U JP 9762590U JP H0455139 U JPH0455139 U JP H0455139U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- foreign matter
- inspection device
- coordinates
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図、第２図は本考案を示す概念図である。
１……ウエーハホールダ、２……ウエーハオサ
エ（固定）、３……ウエーハオサエ（可動）、４
……基準ウエーハ、５……アライメント位置Ａ，
Ｂ、６……アライメント原点、７……ウエーハ座
標。
FIGS. 1 and 2 are conceptual diagrams showing the present invention. 1...Wafer holder, 2...Wafer support (fixed), 3...Wafer support (movable), 4
...Reference wafer, 5...Alignment position A,
B, 6... Alignment origin, 7... Wafer coordinates.
Claims (1)
装置のウエーハ座標を元に異物の形状観察または
、分析を行う検査装置等において、ウエーハ座標
のアライメント原点をウエーハ外部に設けること
を特徴としたウエーハ座標アライメント。 A wafer coordinate alignment characterized in that an alignment origin of the wafer coordinates is provided outside the wafer in a wafer foreign matter inspection device and an inspection device that observes or analyzes the shape of a foreign matter based on the wafer coordinates of the wafer foreign matter inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9762590U JPH0455139U (en) | 1990-09-19 | 1990-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9762590U JPH0455139U (en) | 1990-09-19 | 1990-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455139U true JPH0455139U (en) | 1992-05-12 |
Family
ID=31838162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9762590U Pending JPH0455139U (en) | 1990-09-19 | 1990-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455139U (en) |
-
1990
- 1990-09-19 JP JP9762590U patent/JPH0455139U/ja active Pending