JPS62151728U - - Google Patents
Info
- Publication number
- JPS62151728U JPS62151728U JP3925686U JP3925686U JPS62151728U JP S62151728 U JPS62151728 U JP S62151728U JP 3925686 U JP3925686 U JP 3925686U JP 3925686 U JP3925686 U JP 3925686U JP S62151728 U JPS62151728 U JP S62151728U
- Authority
- JP
- Japan
- Prior art keywords
- tweezers
- holding
- places
- place
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Description
第１図は本考案の半導体ウエハー用ピンセツト
の斜視図である。
１……シリコンウエハー、２……ピンセツト、
３，４……保持（低触）部。
FIG. 1 is a perspective view of the tweezers for semiconductor wafers of the present invention. 1... Silicon wafer, 2... Tweezers,
3, 4...Holding (low touch) part.
Claims (1)
二ケ所を保持することを特徴とする半導体ウエハ
ー用ピンセツト。 A tweezers for semiconductor wafers characterized by holding the semiconductor wafer in one place on the main surface and in two places on the back side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3925686U JPS62151728U (en) | 1986-03-17 | 1986-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3925686U JPS62151728U (en) | 1986-03-17 | 1986-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151728U true JPS62151728U (en) | 1987-09-26 |
Family
ID=30852261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3925686U Pending JPS62151728U (en) | 1986-03-17 | 1986-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151728U (en) |
-
1986
- 1986-03-17 JP JP3925686U patent/JPS62151728U/ja active Pending