JPS61193081U - - Google Patents
Info
- Publication number
- JPS61193081U JPS61193081U JP7580285U JP7580285U JPS61193081U JP S61193081 U JPS61193081 U JP S61193081U JP 7580285 U JP7580285 U JP 7580285U JP 7580285 U JP7580285 U JP 7580285U JP S61193081 U JPS61193081 U JP S61193081U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- plate
- members
- handle
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の実施例の構成を示す図、第２
図は本考案の作用を示す図、第３図は従来のウエ
ーハマガジンの構成を示す図である。
１……スリツト、２……ストツパ、３……把手
、４……ウエーハマガジン、５……置台、６……
置台、７……ロボツト機構、８……ハンド。
Fig. 1 is a diagram showing the configuration of an embodiment of the present invention;
The figure shows the operation of the present invention, and FIG. 3 shows the structure of a conventional wafer magazine. 1... Slit, 2... Stopper, 3... Handle, 4... Wafer magazine, 5... Stand, 6...
Placement stand, 7... Robot mechanism, 8... Hand.
Claims (1)
して成るウエーハマガジンにおいて、前記一対の
板状部材の外側面に所定の同一傾斜を有する把手
を取り付けたことを特徴とするウエーハマガジン
。 1. A wafer magazine comprising a pair of plate-like members facing each other in parallel, characterized in that a handle having a predetermined same slope is attached to the outer surface of the pair of plate-like members.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7580285U JPS61193081U (en) | 1985-05-23 | 1985-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7580285U JPS61193081U (en) | 1985-05-23 | 1985-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61193081U true JPS61193081U (en) | 1986-12-01 |
Family
ID=30617357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7580285U Pending JPS61193081U (en) | 1985-05-23 | 1985-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61193081U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH039547A (en) * | 1989-06-07 | 1991-01-17 | Nec Corp | Semiconductor substrate storing container |
| WO2012036206A1 (en) * | 2010-09-17 | 2012-03-22 | 富士電機株式会社 | Wafer storing device, and wafer cassette storage case |
-
1985
- 1985-05-23 JP JP7580285U patent/JPS61193081U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH039547A (en) * | 1989-06-07 | 1991-01-17 | Nec Corp | Semiconductor substrate storing container |
| WO2012036206A1 (en) * | 2010-09-17 | 2012-03-22 | 富士電機株式会社 | Wafer storing device, and wafer cassette storage case |