JPH0366929U - - Google Patents
Info
- Publication number
- JPH0366929U JPH0366929U JP12805989U JP12805989U JPH0366929U JP H0366929 U JPH0366929 U JP H0366929U JP 12805989 U JP12805989 U JP 12805989U JP 12805989 U JP12805989 U JP 12805989U JP H0366929 U JPH0366929 U JP H0366929U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- jig
- semiconductor wafer
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
Description
第１図はこの考案の一実施例のエアー吹き出し
構造を有するウエーハ吸着治具の斜視図である。
第２図はこの考案の第２実施例のウエーハ吸着治
具の斜視図である。第３図は従来のウエーハ吸着
治具の要部斜視図である。第４図はウエーハ吸着
治具を用いてウエーハ収納ケースからウエーハを
取り出そうとしている部分斜視図である。
１，１′……エアー吹き出し部、２……エアー
送り込みパイプ、３……エアー吸い込み部、４…
…エアー吸い込みパイプ、５……ウエーハ吸着面
、６……ウエーハ収納ケース、７ａ……ウエーハ
ａ（取り出そうとするウエーハ）、７ｂ……ウエ
ーハｂ（隣のウエーハ）。
FIG. 1 is a perspective view of a wafer suction jig having an air blowing structure according to an embodiment of this invention.
FIG. 2 is a perspective view of a wafer suction jig according to a second embodiment of this invention. FIG. 3 is a perspective view of essential parts of a conventional wafer suction jig. FIG. 4 is a partial perspective view of a wafer being taken out from a wafer storage case using a wafer suction jig. 1, 1'...Air blowing part, 2...Air feeding pipe, 3...Air suction part, 4...
...Air suction pipe, 5...Wafer suction surface, 6...Wafer storage case, 7a...Wafer a (wafer to be taken out), 7b...Wafer B (adjacent wafer).
Claims (1)
と接触して真空吸着できる吸着面を有する吸着治
具において、 吸着面の裏側にエアー吹き出し部を設けたこと
を特徴とする半導体ウエーハの吸着治具。[Scope of Claim for Utility Model Registration] A suction jig having a suction surface capable of vacuum suction by contacting the back surface of a semiconductor wafer in order to suction the semiconductor wafer, characterized in that an air blowing part is provided on the back side of the suction surface. Wafer suction jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12805989U JPH0366929U (en) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12805989U JPH0366929U (en) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366929U true JPH0366929U (en) | 1991-06-28 |
Family
ID=31675791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12805989U Pending JPH0366929U (en) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366929U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002302222A (en) * | 2001-03-30 | 2002-10-18 | Sanki Eng Co Ltd | Curved belt conveyor |
| JP2007001737A (en) * | 2005-06-24 | 2007-01-11 | Maruyasu Kikai Kk | Belt conveyer |
-
1989
- 1989-10-31 JP JP12805989U patent/JPH0366929U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002302222A (en) * | 2001-03-30 | 2002-10-18 | Sanki Eng Co Ltd | Curved belt conveyor |
| JP4638074B2 (en) * | 2001-03-30 | 2011-02-23 | 三機工業株式会社 | Curve belt conveyor |
| JP2007001737A (en) * | 2005-06-24 | 2007-01-11 | Maruyasu Kikai Kk | Belt conveyer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0366929U (en) | ||
| JPH01121930U (en) | ||
| JPS63177035U (en) | ||
| JPH01121932U (en) | ||
| JPH0320952U (en) | ||
| JPH0312440U (en) | ||
| JPH0425231U (en) | ||
| JPH03104736U (en) | ||
| JPS6012355U (en) | floor cleaning tools | |
| JPH0265341U (en) | ||
| JPS61114840U (en) | ||
| JPS6377344U (en) | ||
| JPH0338637U (en) | ||
| JPS6315743U (en) | ||
| JPH0467343U (en) | ||
| JPS6313958U (en) | ||
| JPS60106566U (en) | Vacuum cleaner suction tool | |
| JPS6268791U (en) | ||
| JPS5939160U (en) | polishing jig | |
| JPS61192448U (en) | ||
| JPH0184435U (en) | ||
| JPS6454331U (en) | ||
| JPH0256442U (en) | ||
| JPS6063150U (en) | vacuum cleaner | |
| JPS62151728U (en) |